Transparent conductive optical device and a process for the production thereof
First Claim
1. A transparent conductive optical device which comprises a transparent conductive layer of a metal oxide provided on a substrate, characterized in that the degree of oxidation of said transparent conductive layer is differentiated depending on the proximity to said substrate such that the degree of oxidation of said transparent conductive layer adjacent to said substrate is made higher than that of the remaining part thereof.
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Abstract
A transparent conductive optical device comprising a transparent conductive layer of a metal oxide on a substrate wherein the degree of oxidation of the transparent conductive layer is differentiated depending on the proximity to the substrate so that the degree of oxidation adjacent to the substrate is higher than the rest of the layer.
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Citations
9 Claims
- 1. A transparent conductive optical device which comprises a transparent conductive layer of a metal oxide provided on a substrate, characterized in that the degree of oxidation of said transparent conductive layer is differentiated depending on the proximity to said substrate such that the degree of oxidation of said transparent conductive layer adjacent to said substrate is made higher than that of the remaining part thereof.
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9. In a process for producing a transparent conductive device comprising providing a transparent conductive layer of metal oxide on a substrate, the improvement which comprises depositing a constituent of said layer on said substrate in the presence of an oxidizing gas whereby said constituent is a metal oxide, the concentration of said oxidizing gas being higher during the deposition contiguous and adjacent to said substrate and said concentration being lower during deposition more remote from said substrate.
Specification