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High vacuum capacitance manometer having Px side open housing

  • US 4,587,851 A
  • Filed: 02/26/1985
  • Issued: 05/13/1986
  • Est. Priority Date: 02/26/1985
  • Status: Expired due to Fees
First Claim
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1. A sensor unit for a high vacuum capacitance manometer, of the type having an integral vacuum reference chamber, such unit comprising:

  • a diaphragm having first and second sides and a periphery;

    a reference chamber fused to the diaphragm along its periphery on the first side, and including an electrode and means for securing said electrode in a fixed position with respect to the diaphragm;

    a wall ring fused to the diaphragm along its periphery on the second side and extending outwardly therefrom to an outer edge; and

    cap means for removably capping the wall at its outer edge so as to provide a closed pressure receiving chamber with the second side of the diaphragm constituting an inner surface thereof, such cap means being non-destructively removable so as to provide, when removed, access to substantially the entire second side of the diaphragm for cleaning and visual inspection thereof.

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