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Tantalum silicide capacitor

  • US 4,589,056 A
  • Filed: 10/15/1984
  • Issued: 05/13/1986
  • Est. Priority Date: 10/15/1984
  • Status: Expired due to Term
First Claim
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1. A capacitor for an integrated circuit comprising:

  • a first electrically conductive layer composed of a silicide bearing material;

    a dielectric layer disposed over said first electrically conductive layer, said dielectric layer including oxides of said silicide components whereby said dielectric layer comprises a compound of metal, silicon and oxygen; and

    a second electrically conductive layer disposed over said dielectric layer.

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