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Plasma reactor having slotted manifold

  • US 4,590,042 A
  • Filed: 12/24/1984
  • Issued: 05/20/1986
  • Est. Priority Date: 12/24/1984
  • Status: Expired due to Fees
First Claim
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1. A plasma reactor comprising:

  • a gas manifold plate having a first slot for supplying gas and a second slot for exhausting gas;

    a distribution plate having a plurality of gas supply slots and a plurality of gas exhaust slots,said plates being in contact with each other with the slots of one plate not being parallel to the slots in the other plate.

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