Plasma reactor having slotted manifold
First Claim
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1. A plasma reactor comprising:
- a gas manifold plate having a first slot for supplying gas and a second slot for exhausting gas;
a distribution plate having a plurality of gas supply slots and a plurality of gas exhaust slots,said plates being in contact with each other with the slots of one plate not being parallel to the slots in the other plate.
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Abstract
A plasma reactor apparatus is disclosed in which plates having channels are used to redistribute gas uniformly over the surface of a wafer being processed in the reactor. Slot means adjacent the plates provide a final baffle to prevent jetstreams in the gas from impinging directly on the wafer.
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Citations
13 Claims
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1. A plasma reactor comprising:
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a gas manifold plate having a first slot for supplying gas and a second slot for exhausting gas; a distribution plate having a plurality of gas supply slots and a plurality of gas exhaust slots, said plates being in contact with each other with the slots of one plate not being parallel to the slots in the other plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A plasma reactor comprising:
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a gas manifold plate having first and second major surfaces and a slot formed in said first major surface for supplying gas to a plurality of locations across said first major surface; a distribution plate having first and second major and a plurality of bores extending through said plate from one major surface to the other; said plates being in contact with each said bores with said locations; and slot means on said distribution plate for deflecting the gas streams from said bores. - View Dependent Claims (12, 13)
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Specification