Miniature liquid junction reference electrode and an integrated solid state electrochemical sensor including the same
First Claim
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1. A miniature reference electrode providing both electrical connection and a liquid junction between a reference liquid solution and a solution to be tested, comprising:
- a substrate provided with a cavity to hold said reference liquid solution;
a membrane comprising porous silicon closing a first end of said cavity;
means for applying fixed control voltage to said reference liquid solution; and
means for hermetically closing a second end of said cavity.
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Abstract
This invention relates to a miniature reference electrode of the liquid junction-type which is utilized by an integrated electrochemical sensor, which functions as an Ion Sensitive Field Effect Transistor.
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Citations
8 Claims
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1. A miniature reference electrode providing both electrical connection and a liquid junction between a reference liquid solution and a solution to be tested, comprising:
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a substrate provided with a cavity to hold said reference liquid solution; a membrane comprising porous silicon closing a first end of said cavity; means for applying fixed control voltage to said reference liquid solution; and means for hermetically closing a second end of said cavity. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An integrated chemical sensor including an Ion Sensitive Field Effect Transistor formed in a silicon substrate and a miniature reference electrode on said silicon substrate, wherein said electrode comprises:
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a cavity provided in said silicon substrate to hold a reference liquid solutiion; a membrane comprising porous silicon, said membrane closing a first end of said cavity; means for applying a fixed control voltage to said reference liquid solution; and means for hermetically closing a second end of said cavity. - View Dependent Claims (8)
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Specification