Stainless steel overcoat for sputtered films
First Claim
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1. In a method for coating a substrate with an elemental metal film selected from the group consisting of silver, copper, gold, platinum and palladium by cathode sputtering, the improvement which comprises depositing over the elemental metal film a protective overcoat of a metal which forms a dense oxide surface which protects said elemental metal film from oxidation.
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Abstract
A method is disclosed for improving the stability and durability of sputtered metal films such as silver and copper by means of depositing a protective overcoat of a metal such as stainless steel on the exposed surface of the film.
52 Citations
14 Claims
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1. In a method for coating a substrate with an elemental metal film selected from the group consisting of silver, copper, gold, platinum and palladium by cathode sputtering, the improvement which comprises depositing over the elemental metal film a protective overcoat of a metal which forms a dense oxide surface which protects said elemental metal film from oxidation.
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2. In a method for coating a substrate with an elemental metal film by cathode sputtering, the improvement which comprises depositing over the elemental metal film a protective overcoat of a metal selected from the group consisting of stainless steel, titanium, vanadium, chromium, aluminum, tin, tantalum and nickel and alloys thereof.
- 3. In a method for coating a glass substrate with an elemental metal film by cathode sputtering wherein the substrate is first coated with a primer metal which bonds oxidatively with the glass surface, the improvement which comprises depositing over the elemental metal film a protective overcoat of a metal which forms a dense oxide surface, selected from the group consisting of stainless steel, titanium, vanadium, chromium, aluminum, tin, tantalum, nickel and alloys thereof.
- 5. In a method for coating a substrate with an elemental metal film by cathode sputtering, wherein the elemental metal film is selected from the group consisting of silver, gold, platinum, palladium, copper and mixtures thereof, the improvement which comprises depositing over the elemental metal film a protection overcoat of a metal which forms a dense oxide surface selected from the group consisting of stainless steel and titanium.
- 10. In a method for coating glass with a two-layer film of silver and copper by cathode sputtering, the improvement which comprises depositing over the film a protective overcoat of a metal which forms a dense oxide surface layer.
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