Position detecting device

• US 4,595,294 A
• Filed: 09/20/1982
• Issued: 06/17/1986
• Est. Priority Date: 09/26/1981
• Status: Expired due to Term

• Current Assignee: Nikon Corporation
• Original Assignee: Nippon Kogaku KK (Nikon Corporation)
• Inventors: Ohki, Hiroshi, Ogawa, Hidehiro, Takahama, Akio, Fujii, Kenji
• Primary Examiner(s): EVANS, FANNIE L
• Application Number:
  US06/420,124
• Time in Patent Office: 1,366 Days
• Field of Search: 356/138, 356/152, 356/375, 250/561
• US Class Current: 356/615
• CPC Class Codes: G01B 11/02 for measuring length, width or thickness G01B11/08 takes precedence
• CPC Class Codes: G01B 11/024 by means of diode-array scanning
• CPC Class Codes: G01B 11/26 for measuring angles or tapers; for testing the alignment of axes
• CPC Class Codes: G01C 1/06 Arrangements for reading scales

Abstract

A conventional position detecting device for determining the position of a pattern having light and dark areas projected on a image sensor, in which the output signal from the image sensor is converted into a quantized signal through a sample and hold circuit. An improvement according to the invention is provided with a filter for cutting off the frequency components of the quantized signal above a clock frequency used for reading photoelectric outputs in the image sensor to convert the quantized signal into an analog signal to be used for determining the position of the pattern, whereby a high resolving power not limited by the length of each element of the image sensor is achieved.

Claims

1. In a position detecting device for determining the position of a pattern having a light area and dark area by projecting said pattern on an image sensor provided with a linear array of plural photoelectric converting elements, reading the output signals of said photoelectric converting elements in response to clock pulses of a first frequency, and forming a hold signal by holding the output signals of said photoelectric converting elements during an interval of the clock pulses of said first frequency, thereby determining the position of said pattern on said image sensor;

an improvement comprising;

(a) filter means for cutting off the frequency components of said hold signal at least above said first frequency and passing the remaining frequency components of said hold signal as an output signal;

(b) comparator means having a threshold level for comparing the output signal of said filter means with said threshold level and outputting a comparison signal in response to the result of said comparison; and

(c) timer means for measuring the time to the outputting of said comparison signal from said comparator means.

2. A position detecting device according to claim 1, further comprising oscillator means for generating clock pulses of said first frequency and clock pulses of a second frequency higher than said first frequency, and wherein said timer means comprises counter means for counting the number of the clock pulses of said second frequency until the outputting of said comparison signal from said comparator means.

3. A position detecting device according to claim 1, wherein said pattern comprises a substantially linear boundary between said light and dark areas, and said boundary is so positioned as to cross said image sensor outputting angle to the direction of array of said photoelectric converting elements.

4. A position detecting device according to claim 2, wherein said oscillator means generates a start signal for starting the sequential outputting of the output signals from said image sensor;

said pattern is composed of light and dark areas of which at least either is placed between the other areas on said image sensor;

said comparator means generates two comparison signals for said threshold level when the level of the output signal of said filter means becomes substantially equal to said threshold level;

said counter means starts said counting in response to said start signal and counts the number of the clock pulses of said second frequency until the outputting of each comparison signal from said comparator means; and

said timer means comprises means for determining the average of the numbers of counted clock pulses.

5. A position detecting device according to claim 2, wherein said oscillator means comprises:

an oscillator for generating clock pulses of a third frequency;

first converter means for converting the clock pulses of said third frequency into the clock pulses of said first frequency; and

second converter means for converting the clock pulses of said third frequency into the clock pulses of said second frequency.

6. A position detecting device according to claim 5, wherein said oscillator means comprises adjusting means for varying the ratio of said first and second frequencies.

7. A position detecting device according to claim 2, wherein said oscillator means generates a start signal for starting the sequential outputting of the output signals from said image sensor;

said comparator means generates a first comparison signal when the output signal level of said filter means changes from a level lower than said threshold level to a level higher than said threshold level, and generates a second comparison signal when the output signal level of said filter means changes from the level higher than said threshold level to the level lower than said threshold level;

said counter means starts said counting in response to said start signal and counts the number of the clock pulses of said second frequency until the outputting of said first comparison signal from said comparator means and the number of the clock pulses of said second frequency until the outputting of said second comparison signal from said comparator means;

said timer means comprises means for determining the average of the numbers of counted clock pulses.