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Mask feed method and apparatus for exposure replicate systems

  • US 4,598,242 A
  • Filed: 07/03/1984
  • Issued: 07/01/1986
  • Est. Priority Date: 07/04/1983
  • Status: Expired due to Term
First Claim
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1. In an exposure replicate system wherein an object is mounted on an object station on a two-dimensionally movable stage and a mask containing a predetermined pattern to be placed on the object by exposure printing is held opposite to the object at a predetermined distance therefrom by mask holding means, the method of feeding the mask to the mask holding means comprising the steps of:

  • (a) positioning said stage at a first moving position where said object station is opposed to said mask holding means;

    (b) mounting said mask on a mask station arranged on said stage at a different position from said object station;

    (c) moving said stage, along with said mask station and said object station, from said first moving position to a second moving position where said mask is opposed to said mask holding means;

    (d) displacing said mask station so as to make a pre-alignment of said mask with respect to said system; and

    (e) transferring said prealigned mask from said mask station onto said mask holding means.

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