Liquid coating composition for producing high quality, high performance fluorine-doped tin oxide coatings

• US 4,601,917 A
• Filed: 10/04/1985
• Issued: 07/22/1986
• Est. Priority Date: 02/26/1985
• Status: Expired due to Term

• Current Assignee: ATOFINA Chemicals, Inc. (Arkema)
• Original Assignee: M&T Chemicals Incorporated
• Inventors: Russo, David A., Lindner, Georg H.
• Primary Examiner(s): Hoffman, James R.
• Application Number:
  US06/784,279
• Time in Patent Office: 291 Days
• Field of Search: 106/287.19, 427/109, 427/160, 427/166
• US Class Current: 427/109
• CPC Class Codes: C03C 17/2453 Coating containing SnO2

Abstract

A liquid coating composition for producing high quality, high performance fluorine-doped tin oxide coatings by chemical vapor deposition includes 1-30 wt. % of a reactive fluorine dopant compound and 70-99 wt. % of an organotin compound.

Claims

1. A liquid coating composition for making high quality fluorine-doped tin oxide coatings having a low sheet resistance and high visible light transmission comprising:

(a) 1-30 wt. % of a reactive organic fluorine dopant compound where at least one fluorine atom is located alpha or beta to a functional group wherein carbon is bonded to oxygen, selected from carboxylic acid, anhydride, ester, alcohol, ketone, acid halide, or ether; and

(b) 70-99 wt % of an organotin compound which is an alkyltin trichloride, a dialkyltin dichloride, an alkyldichlorotin acetate, a alkylchlorotin diacetate, or an ester tin trichloride;

or tin tetrachloride.

2. A liquid coating composition according to claim 1 wherein said functional group is a carboxylic acid.

3. A liquid coating composition according to claim 1 wherein said functional group is an anhydride.

4. A liquid coating composition according to claim 1 wherein said functional group is an ester.

5. A liquid coating composition according to claim 1 wherein said functional group is an alcohol.

6. A liquid coating composition according to claim 1 wherein said functional group is a ketone.

7. A liquid coating composition according to claim 1 wherein said functional group is an acid halide.

8. A liquid coating composition according to claim 1 wherein said functional compound is an ether.

9. A liquid coating composition according to claim 1 wherein said organotin compound is an alkyltin trichloride.

10. A liquid coating composition according to claim 1 wherein said organotin compound is a dialkyltin dichloride.

11. A liquid coating composition according to claim 1 wherein said organotin compound is an alkylchlorotin diacetate.

12. A liquid coating composition according to claim 1 wherein said organotin compound is an alkyldichlorotin acetate.

13. A liquid coating composition according to claim 1 wherein said organotin compound is an ester tin trichloride.

14. A liquid coating composition according to claim 1 comprising:

(a) 1-30 wt. % of a reactive organic fluorine dopant compound which is trifluoroacetic acid, trifluoroacetic anhydride, ethyl trifluoroacetoacetate, trifluoroethanol, ethyl trifluoroacetate, pentafluoropropionic acid, 2-chloro-1,1,2-trifluoroethyl methyl ether, or 1,1,1-trifluoroacetylacetone; and

(b) 70-99 wt. % of an organotin compound which is an alkyltin trichloride, a dialkyltin dichloride, an alkyldichlorotin acetate, an alkylchlorotin diacetate, an ester tin trichloride;

or tin tetrachloride.

15. A liquid coating composition according to claim 14 wherein said organotin compound is monobutyltin trichloride, methyltin trichloride, isobutyltin trichloride, dibutyltin dichloride, di-t-butyltin dichloride, butyldichlorotin acetate, butylchlorotin diacetate, or carbethoxyethyltin trichloride.

16. A liquid coating composition according to claim 15 in which said organotin compound is monobutyltin trichloride.

17. A liquid coating composition according to claim 15 in which said organotin compound is methyltin trichloride.

18. A liquid coating composition according to claim 15 in which said organotin compound is isobutyltin trichloride.

19. A liquid coating composition according to claim 15 in which said organotin compound is dibutyltin dichloride.

20. A liquid coating composition according to claim 15 in which said organotin compound is di-t-butyltin dichloride.

21. A liquid coating composition according to claim 15 in which said organotin compound is butyldichlorotin acetate.

22. A liquid coating composition according to claim 15 in which said organotin compound is butylchlorotin diacetate.

23. A liquid coating composition according to claim 15 in which said organotin compound is carbethoxyethyltin trichloride.

24. A liquid coating composition according to claim 15 in which said fluorine dopant is trifluoroacetic acid, and said organotin compound is monobutyltin trichloride.

25. A liquid coating composition according to claim 15 comprising 2-10 wt. % of said organic fluorine dopant and 90-98 wt. % of said organotin compound.

26. A liquid coating compound according to claim 25 in which said fluorine dopant is trifluoroacetic acid and said organotin compound is monobutyltin trichloride.

27. A liquid coating composition according to claim 25 in which said fluorine dopant is trifluoroacetic and said organotin compound is butyldichlorotin acetate.

28. A liquid coating composition according to claim 25 in which said fluorine dopant is ethyl trifluoroacetoacetate and said organotin compound is monobutyltin trichloride.

29. A liquid coating compound according to claim 25 in which said fluorine dopant is trifluoroacetic acid and said organotin compound is diisobutyltin dichloride.

30. A liquid coating composition according to claim 25 in which said fluorine dopant is ethyl trifluoroacetate and said organotin compound is monobutyltin trichloride.

31. A liquid coating composition according to claim 25 in which said fluorine dopant is pentafluoropropionic acid and said organotin compound is monobutyltin trichloride.

32. A liquid coating compound according to claim 25 in which said fluorine dopant is trifluoroethanol and said organotin compound is monobutyltin trichloride.

33. A liquid coating composition according to claim 25 in which said fluorine dopant is 2-chloro-1,1,2-trifluoroethylmethyl ether and said organotin compound is monobutyltin trichloride.

34. A liquid coating composition according to claim 25 in which said fluorine dopant is 1,1,1-trifluoroacetyl acetone and said organotin compound is monobutyltin trichloride.

35. A liquid coating composition according to claim 14 in which said fluorine dopant is trifluoroacetic acid.

36. A liquid coating composition according to claim 14 in which said fluorine dopant is trifluoroacetic anhydride.

37. A liquid coating composition according to claim 14 in which said fluorine dopant is ethyl trifluoroacetoacetate.

38. A liquid coating composition according to claim 14 in which said fluorine dopant is trifluoroethanol.

39. A liquid coating composition according to claim 14 in which said fluorine dopant is ethyl trifluoroacetate.

40. A liquid coating composition according to claim 14 in which said fluorine dopant is pentafluoropropionic acid.

41. A liquid coating composition according to claim 14 in which said fluorine dopant is 2-chloro-1,1,2-trifluoroethyl methyl ether.

42. A liquid coating composition according to claim 14 in which said fluorine dopant is 1,1,1-trifluoroacetylacetone.

43. A liquid coating composition according to claim 1 in which said fluorine dopant is 2-10 wt % and said organotin compound is 90-98 wt. %, of the composition.

44. A liquid coating composition according to claim 1 in which said fluorine dopant is about 5 wt. % and said organotin compound is about 95 wt. % of the composition.

45. A liquid coating composition according to claim 1 which also includes 1-10 wt. % of a polar organic compound.

46. A liquid coating composition according to claim 45 in which said fluorine dopant is 2-10 wt. %, said organotin compound is 80-97 wt. %, and said polar organic compound is 1-10 wt. %, of said composition.

47. A liquid coating composition according to claim 46 comprising 2-10 wt. % of trifluoroacetic acid, 80-97 wt. % of monobutyltin trichloride and 1-10 wt. % of a polar organic liquid.

48. A liquid coating composition according to claim 46 in which the polar organic compound is methylisobutyl ketone, acetic anhydride or ethyl acetate.

55. A method of producing a high quality fluorine-doped tin oxide coating having a low sheet resistance and high visible light transmission comprising:

(a) forming a liquid coating composition of claim 1;

(b) vaporizing said liquid composition; and

(c) contacting said vapor in an oxygen-containing atmosphere with a substrate maintained at a temperature above the decomposition temperature of said vapor.

56. A method of producing a high quality fluorine-doped tin oxide coating according to claim 55 in which said oxygen-containing atmosphere is air.

57. A method according to claim 55 where said vaporization temperature is about 100°

-400°

C.

58. A method according to claim 55 where said vaporization temperature is about 150°

-250°

C.

59. A method according to claim 55 where said decomposition temperature is above 400°

and below 700°

C.

60. A method according to claim 55 where said decomposition temperature is about 550°

-650°

C.

61. A method according to claim 55 where said deposition is carried out for 45 seconds or less to produce a coating having a thickness of 160-220 nm, a sheet resistance of less than 40 ohms/square, an infrared reflectivity of greater than 70% and a visible light transmission of at least 80%.

62. A method according to claim 55 where said substrate is glass.

49. A liquid coating composition for making high quality fluorine-doped tin oxide coatings having a low sheet resistance and high visible light transmission comprising:

(a) 1-30 wt. % of a reactive organic fluorine dopant compound where at least one fluorine atom is located alpha or beta to a functional group wherein carbon is bonded to oxygen selected from carboxylic acid, anhydride, ester, alcohol, ketone, acid halide, or ether; and

(b) 70-99 wt. % of tin tetrachloride.

50. A liquid coating composition according to claim 49 comprising:

(a) 1-30 wt. % of an organic fluorine dopant compound which is trifluoroacetic acid, trifluoroacetic anhydride, ethyl trifluoroacetoacetate, trifluoroethanol, ethyl trifluoroacetate, pentafluoropropionic acid, 2-chloro-1,1,2-trifluoroethyl methyl ether, or 1,1,1-trifluoroacetylacetone; and

(b) 70-99 wt. % of tin tetrachloride.

51. A liquid coating composition according to claim 49 in which said fluorine dopant is 2-10 wt. %, and said tin tetrachloride is 90-98 wt. % of the composition.

52. A liquid coating composition according to claim 49 in which said fluorine dopant is about 5 wt. %, and said organotin compound is about 95 wt. % of the composition.

53. A liquid coating composition according to claim 52 in which said fluorine dopant is trifluoroacetic acid.

54. A method of producing a high quality fluorine-doped tin oxide coating having a low sheet resistance and high visible light transmission comprising:

(a) forming a liquid coating composition of claim 49;

(b) vaporizing said liquid composition; and

(c) contacting said vapor in an oxygen-containing atmosphere with a substrate maintained at a temperature above the decomposition temperature of said vapor.