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Amorphous silicon solar battery

  • US 4,605,813 A
  • Filed: 07/11/1985
  • Issued: 08/12/1986
  • Est. Priority Date: 09/29/1982
  • Status: Expired due to Term
First Claim
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1. A flexible amorphous silicon solar battery for attaching to a curved body portion comprising:

  • a metal foil as the substrate thereof;

    an insulating layer which is amorphous silicon nitride containing hydrogen formed on said metal foil integrally by plasma chemical vapor deposition, the thickness of which is 0.05-0.2 μ

    m; and

    at least one amorphous silicon photoelectric conversion portion formed on said insulating layer.

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