Apparatus for controlling a plasma

• US 4,609,810 A
• Filed: 06/25/1984
• Issued: 09/02/1986
• Est. Priority Date: 06/25/1984
• Status: Expired due to Fees

• Current Assignee: Perkin-Elmer Llc (Revvity, Inc.)
• Original Assignee: The Perkin-Elmer Corporation (Thermo Fisher Scientific Incorporated)
• Inventors: O'Brien, Michael J., Wallace, Gordon F.
• Primary Examiner(s): PASCHALL, MARK H
• Application Number:
  US06/624,313
• Time in Patent Office: 799 Days
• Field of Search: 219/121 PM, 219/121 PS, 219/121 PT, 219/121 PU, 219/137 R, 219/130.21, 156/643, 156/345, 156/646, 204/192 E, 204/192 EC, 315/111.51
• US Class Current: 219/121.54
• CPC Class Codes: H05H 1/30 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/28 takes precedence
• CPC Class Codes: H05H 1/36 Circuit arrangements H05H1/38, H05H1/40 take precedence

Abstract

An apparatus for controlling a plasma discharge includes a light gathering tube remotely directed at the plasma discharge. The gathered light is transmitted, via a filter optic light pipe, to a detector that produces a signal that is compared with at least one reference signal. After comparing the signals the RF power to the plasma torch is either interrupted or continued.

Claims

1. Apparatus for preventing damage to a plasma torch comprising:

a plasma torch which includes a quartz tube through which an inert gas flows and a helical RF coil disposed on the outside diameter of said quartz tube substantially at one end thereof;

said RF coil being energizable so as to ignite said inert gas emanating from said one end of said quartz tube, the ignited inert gas forming a plasma discharge;

light gathering means, directed at a predetermined volume above said RF coil, for gathering a portion of the light from the plasma discharge;

detector means, remote from said light gathering means, for producing a detector signal indicative of the light intensity of the plasma discharge;

light transmitting means, coupled between said light gathering means and said detector means, to transmit light from said light gathering means to said detector means;

reference signal means for supplying two reference signals comprising a static reference signal, having a predetermined value, and a dynamic reference signal proportional to the instantaneous power to said RF coil;

comparing means for comparing the detector signal with said two reference signals; and

de-energizing means to de-energize said RF coil whenever the detector signal is below either of said two reference signals.

2. An apparatus as claimed in claim 1 wherein said light gathering means includes a cylinder having an opening at one end thereof defining an aperture, said aperture being of smaller diameter than the diameter throughout the remainder of said cylinder.

3. An apparatus as claimed in claim 2 wherein the axis of said cylinder is substantially perpendicular to the axis of said quartz tube and an adjustable distance above said RF coil.

4. An apparatus as claimed in claim 3 wherein said aperture has a diameter of about 1.6 millimeters and said predetermined volume is about 10 millimeters above said RF coil.

5. An apparatus as claimed in claim 1 wherein said light transmitting means includes a fiber optic light pipe providing optical communication between said light gathering means and said detector means.

6. An apparatus as claimed in claim 5 wherein said fiber optic light pipe filters out ultraviolet radiation.

7. An apparatus as claimed in claim 1 wherein said detector means includes a photodiode mounted remote from said plasma torch.