Absolute pressure transducer
First Claim
1. A capacitive absolute pressure transducer comprising:
- a base plate of an insulating materiala fixed capacitor electrode disposed on the base plate,a moving capacitor electrode diaphragm of silicon, at least partly aligned with the fixed capacitor electrode, and spaced from it so that a hermetically sealed chamber is formed between the fixed electrode and the moving diaphragm electrode, andelectrical contacts attached to the fixed electrode and moving diaphragm electrode, respectively,the base plate being bonded with a conductive material wafer to obtain a laminated substrate,the diaphragm electrode of the capacitor being essentially an integrated structure with the surrounding and essentially thicker collar part, andthe electrical path to the fixed capacitor electrode in the area of the vacuum chamber being formed by a well that penetrates the base plate to the conductive wafer.
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Accused Products
Abstract
Described herein is a capacitive absolute pressure transducer including a flat base plate (9) of insulating material, e.g., of glass, with a fixed capacitor electrode (10), aligned on the base plate. A silicon-material moving diaphragm electrode (5) of the capacitor is at least partly aligned with the fixed electrode (10), properly spaced to implement a hermetically sealed vacuum chamber (7) between the fixed electrode (10) and moving diaphragm electrode (5). Electrical contacts (12) are attached to the fixed electrode (10) and the moving diaphragm electrode (5). According to the invention, the flat base plate (9) is bonded to an electrically conductive wafer (8) to implement a laminated substrate (2), the diaphragm electrode (5) fabricated integral with a surrounding and essentially thicker collar part (18), and the electrical contact to the fixed capacitor plate (10) in the area of the vacuum chamber (7) is a well (11, 12) extending through the base plate (9) to the wafer (8).
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Citations
13 Claims
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1. A capacitive absolute pressure transducer comprising:
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a base plate of an insulating material a fixed capacitor electrode disposed on the base plate, a moving capacitor electrode diaphragm of silicon, at least partly aligned with the fixed capacitor electrode, and spaced from it so that a hermetically sealed chamber is formed between the fixed electrode and the moving diaphragm electrode, and electrical contacts attached to the fixed electrode and moving diaphragm electrode, respectively, the base plate being bonded with a conductive material wafer to obtain a laminated substrate, the diaphragm electrode of the capacitor being essentially an integrated structure with the surrounding and essentially thicker collar part, and the electrical path to the fixed capacitor electrode in the area of the vacuum chamber being formed by a well that penetrates the base plate to the conductive wafer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification