Method and apparatus for throttling gas flow to a cryopump

• US 4,611,467 A
• Filed: 06/10/1985
• Issued: 09/16/1986
• Est. Priority Date: 06/10/1985
• Status: Expired due to Term

• Current Assignee: Helix Technology Corporation (Azenta, Inc.)
• Original Assignee: Helix Technology Corporation (Azenta, Inc.)
• Inventors: Peterson, John F.
• Primary Examiner(s): Capossela, Ronald C.
• Application Number:
  US06/742,885
• Time in Patent Office: 463 Days
• Field of Search: 62/100, 62/268, 62/55.5, 55/269, 417/901
• US Class Current: 62/55.5
• CPC Class Codes: F04B 37/08 by condensing or freezing, e.g. cryogenic pumps
• CPC Class Codes: Y10S 417/901 Cryogenic pumps

Abstract

Orifices in a cooled plate throttle gases entering a cryopump. Selected orifices are closed by removable closures such as spring clips to allow the throttling to be varied.

Claims

1. A cryopump comprising a cold first stage and a colder second stage, a second stage cryopanel, a radiation shield surrounding the second stage and a first stage orifice plate closing the radiation shield, the orifice plate having a plurality or orifices therein for allowing restricted flow of gas into the radiation shield to the second stage cryopanel, at least one of the orifices being closed by a removable closure secured to the orifice plate at the closed orifice.

2. A cryopump as claimed in claim 1 wherein the closure is a spring clip.

3. A cryopump as claimed in claim 2 wherein the orifices are circular and the closure comprises a circular plate having bent spring legs extending generally normal thereto which legs press outwardly against the edge of a circular orifice to secure the closure plate against the orifice plate after the spring legs are forced into the orifice.

4. A cryopump as claimed in claim 1 wherein a plurality of orifices are closed by closures independently secured to the orifice plate at the respective closed orifices.

5. A method of regulating flow of gas into a cryopump comprising providing an orifice plate at the inlet to the cryopump, the orifice plate having a plurality of orifices therein, selectively closing one of more orifices in the orifice plate by means of removable closures individually secured to the orifice plate, and thereafter cooling the cryopump, including the orifice plate and closures.

6. A method as claimed in claim 5 wherein the closures are spring clips.

7. A method as claimed in claim 6 wherein the orifices are circular and each closure comprises a circular plate having bent spring legs extending generally normal thereto, which legs press outwardly against the edge of a circular orifice to secure the closure plate against the orifice plate after the spring legs are formed into the orifice.