Method of controlling deposition amount distribution in a vacuum deposition plating

• US 4,612,206 A
• Filed: 06/03/1985
• Issued: 09/16/1986
• Est. Priority Date: 06/04/1984
• Status: Expired due to Term

• Current Assignee: Mitsubishi Jukogyo Kabushiki Kaisha, Nisshin Steel Company Limited (Nippon Steel Corporation)
• Original Assignee: Mitsubishi Jukogyo Kabushiki Kaisha, Nisshin Steel Company Limited (Nippon Steel Corporation)
• Inventors: Kittaka, Toshiharu, Kato, Mitsuo, Wada, Tetsuyoshi, Yanagi, Kenichi, Furukawa, Heizaburo, Shimozato, Yoshio, Morita, Arihiko, Nakanishi, Yasuji, Wake, Kanji, Aiko, Takuya, Tsukiji, Norio
• Primary Examiner(s): Childs, Sadie L.
• Application Number:
  US06/740,553
• Time in Patent Office: 470 Days
• Field of Search: 427/9, 427/250, 427/255.5, 118/692, 118/718, 118/726
• US Class Current: 427/9
• CPC Class Codes: C23C 14/24 Vacuum evaporation
• CPC Class Codes: C23C 14/562 for coating elongated substrates

Abstract

In a continuous vacuum deposition plating of a metal strip, thinner coating at the edges can be prevented by maintaining the pressure of the deposition chamber in which an evaporation chamber is housed at a properly higher level than the pressure of the evaporation chamber.

Claims

1. A method of controlling the transverse thickness distribution of deposited metal film in a continuous vacuum deposition plating process using an apparatus comprising an evacuable deposition chamber in which an evaporation chamber for evaporating a metal to be deposited is contained and in which a substrate sheet strip is hermetically introduced and let out so that the metal vapor is deposited on the surface of the strip at the outlet of the evaporation chamber, said method comprising preliminarily determining the pressure difference between the evacuable deposition chamber and the evaporation chamber which will provide transversely uniform thickness of deposition, determining the vapor pressure in the evaporation chamber which brings about a coating of a desired thickness, and regulating the pressure deposition chamber so as to maintain preliminarily determined pressure difference.

2. The method as described in claim 1, wherein the substrate metal is steel strip and the metal to be deposited is zinc.

3. The method as described in claim 1, wherein the transverse thickness distribution of deposited metal film is detected and the detected information is fed back to a means which controls the pressure of the deposition chamber so that the determined pressure difference is maintained.

4. The method as described in claim 3, wherein the pressure control means is a valve to an evacuation means.

5. The method as described in claim 3, wherein the pressure control means is a leak-in valve.