Thin film solar cell with ZnO window layer
First Claim
1. A thin film photovoltaic device comprising, in order, a first layer of copper indium diselenide semiconductor, a second layer of high resistivity zinc oxide semiconductor in contact with said first layer, and a third layer of low resistivity zinc oxide semiconductor in contact with said second layer.
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Abstract
A thin film photovoltaic device comprising a first layer of copper indium diselenide p-type semiconductor and a second layer of n-type zinc oxide semiconductor. In a preferred form, the first portion of the zinc oxide film at the junction with the CIS is undoped to have relatively high resistivity, while the remaining portion thereof is doped to achieve low resistivity. The zinc oxide is preferably deposited by a low temperature chemical vapor deposition process.
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Citations
11 Claims
- 1. A thin film photovoltaic device comprising, in order, a first layer of copper indium diselenide semiconductor, a second layer of high resistivity zinc oxide semiconductor in contact with said first layer, and a third layer of low resistivity zinc oxide semiconductor in contact with said second layer.
- 7. A thin film photovoltaic device having a first layer of copper indium diselenide forming a junction with a second layer comprising primarily zinc oxide wherein said zinc oxide layer is deposited on said first layer by a low temperature chemical vapor deposition process.
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