Ambient sensing devices

• US 4,613,422 A
• Filed: 01/19/1984
• Issued: 09/23/1986
• Est. Priority Date: 01/19/1984
• Status: Expired due to Term

• Current Assignee: Integrated Ionics Incorporated
• Original Assignee: Integrated Ionics Incorporated
• Inventors: Lauks, Imants R.
• Primary Examiner(s): Niebling, John F.
• Assistant Examiner(s): Nguyen, Nam X.
• Application Number:
  US06/572,199
• Time in Patent Office: 978 Days
• Field of Search: 204/414, 204/415, 204/416, 204/418, 204/419, 204/420, 204/433, 128/635, 357/23 I, 357/25
• US Class Current: 204/419
• CPC Class Codes: G01N 27/3335 the membrane containing at least one organic component G01N27/3271 takes precedence; aspects concerning the enzyme reagent in enzyme electrodes C12Q1/001
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48137 the bodies being arranged next to each other, e.g. on a common substrate
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/13091 Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
• CPC Class Codes: H01L 2924/3011 Impedance

Abstract

A device for the measurement of ionic and gas species at high temperatures. Platinum metal oxides are used for the electrical signal paths between electrical elements on the device to make the device particularly adaptable to high temperature measurement applications. Chemically sensitive composite structures may be hardened for high temperature applications by mixing polyimide with the materials normally used in the outer layer of such structure.

Claims

1. A device for the measurement of a chemical or an ionic species comprising:

an amorphous oxide of a metal of the platinum or rhenium groups of metals, and

a layer of material sensitive to said chemical or ionic species distinct from said amorphous metal oxide formed on said amorphous metal oxide and in electrical contact therewith, said sensitive layer developing an electrical potential upon contact with said chemical or ionic species and said metal oxide transmitting an electrical signal that is a function of said electrical potential.

2. The device of claim 1 wherein said metal oxide is sputtered iridium oxide.

3. The device of claim 1 further comprising a continuous semi-permeable outermost layer that is a mixture of polyimide and either polytetrafluorethylene or zeolite, said outermost layer overlaying said sensitive layer and separating it from an environment in which the device is located but permeable to the chemical or ionic species to be measured.

4. The device of claim 3 wherein said sensitive material is one or more of AgCl, AgBr, AgI, LaF₃, Ag₂ S, HgS and Bi₂ S₃.

5. A device for the measurement of a chemical or ionic species comprising:

a chemically sensitive layer that develops an electrical potential representative of the concentration of said species, and

one or more continuous semi-permeable layers overlaying said sensitive layer and separating it from an environment in which the device is located but permeable to the chemical or ionic species to be measured, wherein the outermost layer contains polyimide.

6. A device for the measurement of activity of a gas species comprising:

a chemically sensitive layer which develops an electrical potential representative of the concentration of said gas when the device is exposed to said gas;

means in electrical contact with said chemical sensitive layer for transmitting a signal that is a function of said electrical potential;

a gas conducting aqueous epoxy medium in electrochemical contact with said chemical sensitive layer, and

a heterogeneous membrane containing polyimide, said membrane separating said epoxy medium from said gas species and being permeable to said gas species.

7. The device of claim 6 wherein said chemically sensitive layer comprises sputtered iridium oxide and said aqueous epoxy medium comprises epoxy, H₂ O, NaHCO₃, and NaCl.

8. The device of claim 6 wherein said chemically sensitive layer comprises Ag₂ S and said aqueous epoxy medium comprises epoxy, H₂ O, NaHS, and NaCl.

9. The device of claim 6 wherein said means in electrical contact with said chemically sensitive layer comprises a metal oxide as a conductive underlayment, said metal being selected from the platinum and rhenium group of metals;

and

said chemically sensitive layer on and in electrical contact with said underlayment develops an electrical potential upon contact with said gas species and undergoes a reversible reaction with said metal oxide whereby said metal oxide transmits an electrical signal that is a function of the activity of said gas species.

10. The device of claim 6 wherein said heterogeneous membrane comprises polytetrafluoroethylene or zeolite suspended in polyimide.

11. A device for the measurement of a gas species comprising:

a chemically sensitive layer that develops an electrical potential representative of the concentration of said gas, and

one or more continuous semi-permeable layers overlaying said sensitive layer and separating it from an environment in which the device is located, wherein the outermost layer is a mixture of polyimide and either polytetrafluoroethylene or zeolite.

12. A device for the measurement of activity of an ionic species comprising:

a ceramic container filled with an electrolyte medium and containing a reference electrode;

a chemically sensitive layer mounted on an exterior surface of said container;

electronic circuitry connected to said layer and mounted on said surface of said container wherein said chemically sensitive layer and said electronic circuitry are made with materials which are stable at high temperatures;

signal paths interconnecting said chemically sensitive layer and said electronic circuitry;

a hermetic seal encompassing said electronic circuitry; and

one or more continuous semi-permeable layers overlaying said sensitive layer and separating it from an environment in which the device is located but permeable to the chemical or ionic species to be measured, wherein the outermost layer contains polyimide.

13. The device of claim 12 wherein said chemically sensitive layer comprises one or more of AgCl, AgBr, AgI, LaF₃, Ag₂ S, HgS and Bi₂ S₃.

14. The device of claim 12 wherein said electronic circuitry comprises one or more amplifiers.

15. The device of claim 12 comprising a plurality of sensitive layers sensitive to different chemical or ionic species.

16. The device of claim 12 where said signal path comprises a metal from the platinum or rhenium group of metals.

17. The device of claim 12 wherein said signal path comprises iridium oxide.

18. The device of claim 15 wherein said signal path is sputtered onto said ceramic substrate to a depth approximating 1000 Angstroms.

19. A device for the measurement of a chemical or an ionic species comprising:

an amorphous oxide of a metal of the platinum or rhenium groups of metals,

a layer of material sensitive to said chemical or ionic species formed on said amorphous metal oxide and in electrical contact therewith, said sensitive layer developing an electrical potential upon contact with said chemical or ionic species and said metal oxide transmitting an electrical signal that is a function of said electrical potential, and

one or more continuous semi-permeable layers overlaying said sensitive layer and separating it from an environment in which the device is located but permeable to the chemical or ionic species to be measured, wherein the outermost layer contains polyimide.

20. The device of claim 19 wherein the outermost layer is a mixture of polyimide and either polytetrafluoroethylene or zeolite.

21. The device of claim 19 wherein said sensitive material is one or more of AgCl, AgBr, AgI, LaF₃, Ag₂ S, HgS and Bi₂ S₃.

22. The device of claim 19 comprising a plurality of sensitive layers sensitive to different chemical or ionic species.