Planar coil magnetic transducer
First Claim
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1. A magnetic transducer comprising:
- a generally planar high resistivity substrate having a first major planar surface and an opposing second major planar surface;
a generally planar first coil having one side secured to said first major planar surface of said substrate;
a magnet positioned adjacent said second surface on the opposite side of said substrate from said generally planar first coil;
said planar first coil including an inwardly winding conductive path from an outside connection terminal to an inside connection terminal;
said first coil being copper formed on chromium;
said substrate being formed of a ceramic material;
said conductive path being formed of a plurality of connected conductive runs, each conductive run having a generally rectangular boundary and successively nested within one another, each conductive run having a width of about 5 microns, a spacing of about 5 microns, from an adjacent coil conductive run, and a height in the range of about 1 to 3 microns;
a non-conducting passivating layer formed on said planar first coil;
a generally planar second conductive coil having one side secured to said passivating layer on the side opposite from said first coil;
a conductive interconnection extending through said passivating layer between said first and second coils; and
said second conductive coil being formed of a plurality of connected conductive runs, each conductive run having a generally rectangular boundary and successively nested within one another.
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Accused Products
Abstract
A planar magnetic transducer uses thin film technology to form a coil on a ceramic substrate. A relatively powerful magnet is positioned adjacent the substrate so a changing magnetic reluctance adjacent to the coil can be detected by a voltage change at the coil.
78 Citations
2 Claims
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1. A magnetic transducer comprising:
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a generally planar high resistivity substrate having a first major planar surface and an opposing second major planar surface; a generally planar first coil having one side secured to said first major planar surface of said substrate; a magnet positioned adjacent said second surface on the opposite side of said substrate from said generally planar first coil; said planar first coil including an inwardly winding conductive path from an outside connection terminal to an inside connection terminal; said first coil being copper formed on chromium; said substrate being formed of a ceramic material; said conductive path being formed of a plurality of connected conductive runs, each conductive run having a generally rectangular boundary and successively nested within one another, each conductive run having a width of about 5 microns, a spacing of about 5 microns, from an adjacent coil conductive run, and a height in the range of about 1 to 3 microns; a non-conducting passivating layer formed on said planar first coil; a generally planar second conductive coil having one side secured to said passivating layer on the side opposite from said first coil; a conductive interconnection extending through said passivating layer between said first and second coils; and said second conductive coil being formed of a plurality of connected conductive runs, each conductive run having a generally rectangular boundary and successively nested within one another. - View Dependent Claims (2)
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Specification
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Current AssigneeVisteon Global Technologies Incorporated (Visteon Corporation)
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Original AssigneeFord Motor Company
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InventorsHaeberle, Russell J., Winegar, Brian G., Esper, Michael J.
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Primary Examiner(s)Grimley, Arthur T.
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Assistant Examiner(s)Romano, C.
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Application NumberUS06/663,523Time in Patent Office701 DaysField of Search336/110, 336/155, 336/180, 336/196, 336/200, 336/232, 310/155, 324/173, 324/174, 324/208US Class Current336/232CPC Class CodesF02P 7/0675 with variable reluctance, e...G01P 3/487 delivered by rotating magnetsH01F 27/2804 Printed windingsH02K 3/26 consisting of printed condu...
