Frame addressed spatial light modulator
First Claim
Patent Images
1. A frame addressed spatial light modulator, comprising:
- (a) a two dimensional array of pixels on a substrate and arranged into columns, each of said pixels including (i) a column transfer portion, (ii) a sense portion adjacent said column transfer portion, (iii) a conducting layer over at least a part of said portion, and (iv) at least one deflectable reflecting flap connected to said sense portion and over but insulated from said layer;
(b) a column transfer gate for transferring signals from the column transfer portion of a pixel to the column transfer portion of an adjacent pixel in the same column; and
(c) a sense transfer gate for transferring signals from the column transfer portion of a pixel to the sense portion of the same pixel.
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Accused Products
Abstract
A frame addressed spatial light modulator with pixels arranged along columns of charge transfer devices, and optical projection and processing systems using such modulators are disclosed. The pixels include electrostatically deflectable flaps supported by conducting posts with nodes gated to the charge transfer device. Schlieren, dark field and reverse dark field optics are available.
480 Citations
18 Claims
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1. A frame addressed spatial light modulator, comprising:
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(a) a two dimensional array of pixels on a substrate and arranged into columns, each of said pixels including (i) a column transfer portion, (ii) a sense portion adjacent said column transfer portion, (iii) a conducting layer over at least a part of said portion, and (iv) at least one deflectable reflecting flap connected to said sense portion and over but insulated from said layer; (b) a column transfer gate for transferring signals from the column transfer portion of a pixel to the column transfer portion of an adjacent pixel in the same column; and (c) a sense transfer gate for transferring signals from the column transfer portion of a pixel to the sense portion of the same pixel. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A frame addressed spatial light modulator, comprising:
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(a) a plurality of parallel CCDs on a substrate; (b) a plurality of sense nodes on said substrate, each of said nodes adjacent one of said CCDs; (c) at least one frame transfer gate for transferring change packets from potential wells in said CCDs to said nodes; and (d) a plurality of electrostatically deflectable reflecting flaps conductively supported by flap supports on said nodes, each of said nodes connected to at least one of said flap supports. - View Dependent Claims (8, 9, 10, 11)
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12. A frame addressed spatial light modulator, comprising:
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(a) an array of pixels on a substrate and arranged into columns; (b) charge transfer devices on said substrate for transferring signal charge packets down said columns; (c) a serial to parallel converter on said substrate, the outputs of said converter connected to said charge transfer devices; (d) frame transfer gates on said substrate for transferring signal charge packets from said columns to said pixels essentially simultaneously for all pixels; and (e) said pixels characterized by a sense node on said substrate connected to at least one electrostatically deflectable, reflecting flap supported on said substrate. - View Dependent Claims (13, 14)
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15. An image projection system for electronic image data, comprising:
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(a) a light source; (b) a spatial light modulator of said data; (c) an optical system for directing light from said source onto said modulator and for projecting modulated light from said modulator onto a projection screen; and (d) said modulator including; (i) a plurality of parallel CCDs on a substrate; (ii) a plurality of sense nodes on said substrate, each of said nodes adjacent one of said CCDs; (iii) at least one frame transfer gate for transferring charge packets from potential wells in said CCDs to said nodes; (iv) a plurality of electrostatically deflectable reflecting flaps conductively supported by flap supports on said nodes, each of said nodes connected to at least one of said flap supports; and (v) a converter for inputting said data into said CCDs. - View Dependent Claims (16)
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17. An optical processor for electronic data, comprising:
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(a) a light source; (b) a spatial light modulator for said data; (c) an optical system for directing light from said source onto said modulator and for converting modulated light from said modulator into electronic output; and (d) said modulator including; (i) a plurality of parallel CCDs on a substrate; (ii) a plurality of sense nodes on said substrate, each of said nodes adjacent one of said CCDs; (iii) at least one frame transfer gate for transferring charge packets from potential weels in said CCDs to said nodes; (iv) a plurality of electrostatically deflectable reflecting flaps conductively supported by flap supports on said nodes, each of said nodes connected to at least one of said flap supports; and (v) a converter for inputting said data into said CCDs. - View Dependent Claims (18)
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Specification