High pressure capacitive transducer

• US 4,617,607 A
• Filed: 12/10/1985
• Issued: 10/14/1986
• Est. Priority Date: 12/10/1985
• Status: Expired due to Fees

• Current Assignee: Kavlico Corporation (Sensata Technologies Holding Plc)
• Original Assignee: Kavlico Corporation (Sensata Technologies Holding Plc)
• Inventors: Park, Kyong, Chen, Hung-Chih
• Primary Examiner(s): GRIFFIN, DONALD
• Application Number:
  US06/807,258
• Time in Patent Office: 308 Days
• Field of Search: 73/718, 73/724, 361/283
• US Class Current: 361/283.4
• CPC Class Codes: G01L 9/0072 using variations in capacitance
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

A high pressure capacitive transducer includes a capacitive pressure transducer having an insulating diaphragm, and a high pressure fitting for housing the transducer. The high pressure fitting includes a flexible metal diaphragm bonded to the fitting, with the metal diaphragm in engagement with the insulating diaphragm. The metal diaphragm may be boned to the fitting around the periphery of the metal diaphragm to block the high pressure fluid from the transducer. The insulating diaphragm may be relatively thick, such as one-twentieth, one-tenth, or one-fifth of an inch thick, for example.

Claims

1. A simple and reliable high pressure transducer comprising:

a capacitive pressure transducer made of two closely spaced insulating plates of low mechanical hysteresis material, said plates each having a layer of conductive material on their opposed faces forming electrodes which are spaced slightly apart from one-another, and at least one of said plates being a diaphragm which is flexible under high pressure to deflect toward the other plate and change the capacitance between said electrodes;

a high pressure fitting for mounting and enclosing said capacitive transducer, said high pressure fitting including a coupling for connecting to a source of high pressure fluid, and a high pressure chamber having an extent comparable to that of the insulating diaphragm;

a thin flexible metal diaphragm bonded to said fitting and sealing said high pressure chamber and blocking high pressure fluid from said transducer; and

means for mounting said transducer within said fitting with the insulating diaphragm in firm engagement with said flexible sheet metal diaphragm, whereby, when the high pressure applied to said coupling changes, the deflection of said sheet metal member and insulating diaphragm change correspondingly, and the resultant changed output capacitance of the transducer indicates the new pressure level.

2. A high pressure transducer as defined in claim 1 wherein said insulating plates are made of alumina.

3. A high pressure transducer as defined in claim 1 wherein said fitting and said sheet metal diaphragm are made of stainless steel.

4. A high pressure transducer as defined in claim 1 wherein said insulating diaphragm is at least 0.1 inch thick.

5. A high pressure transducer as defined in claim 1 wherein said sheet metal diaphragm is in the order of three to twelve thousandths of an inch thick.

6. A high pressure transducer as defined in claim 1 wherein said sheet metal diaphragm is welded to and sealed to said fitting to block high pressure from said two insulating plates.

7. A high pressure transducer as defined in claim 1 wherein said two insulating plates and said sheet metal diaphragm are circular in configuration.

8. A high pressure transducer as defined in claim 1 wherein said insulating plates are formed of high compressive strength material.

9. A high pressure transducer as defined in claim 1 wherein said mounting means includes a heavy retaining ring in extended threaded engagement with said fitting for holding said two insulating plates with the insulating diaphragm firmly against said metal diaphragm.

10. A simple and reliable high pressure transducer comprising:

a capacitive pressure transducer made of two closely spaced insulating plates of low mechanical hysteresis material, said plates each having a layer of conductive material on their opposed faces forming electrodes which are spaced slightly apart from one another, and at least one of said plates being a diaphragm which is flexible under high pressure to deflect toward the other plate and change the capacitance between said electrodes;

a high pressure fitting for mounting and enclosing said capacitive transducer, said high pressure fitting including a coupling for handling pressures in excess of 5,000 psi for connecting to a source of high pressure fluid, and a high pressure chamber having an extent comparable to that of the insulating diaphragm;

a thin flexible metal diaphragm bonded to said fitting and sealing said high pressure chamber and blocking high pressure fluid from said transducer;

means for mounting said transducer within said fitting with the insulating diaphragm in firm engagement with said flexible sheet metal diaphragm; and

said mounting means including a heavy retaining ring is extended threaded engagement with said fitting for holding said two insulating plates with the insulating diaphragm firmly against said metal diaphragm;

whereby, when the high pressure applied to said coupling changes, the deflection of said sheet metal member and insulating diaphragm change correspondingly, and the resultant changed output capacitance of the transducer indicates the new pressure level.

11. A high pressure transducer as defined in claim 10 wherein said insulating plates are made of alumina.

12. A high pressure transducer as defined in claim 10 wherein said fitting and said sheet metal diaphragm are made of stainless steel.

13. A high pressure transducer as defined in claim 10 wherein said insulating diaphragm is at least 0.1 inch thick.

14. A high pressure transducer as defined in claim 10 wherein said sheet metal diaphragm is in the order of three to twelve thousandths of an inch thick.

15. A high pressure transducer as defined in claim 10 wherein said sheet metal diaphragm is welded to and sealed to said fitting to block high pressure from said two insulating plates.

16. A high pressure transducer as defined in claim 10 wherein said two insulating plates and said sheet metal diaphragm are circular in configuration.

17. A high pressure transducer as defined in claim 10 wherein said insulating plates are formed of high compressive strength material.

18. A high pressure transducer as defined in claim 10 wherein said fitting has a shoulder for engaging said insulating diaphragm, and said shoulder is recessed to receive said metal diaphragm with the surface of said metal diaphragm flush with the surface of said shoulder to intimately engage said insulating diaphragm.