Variable gap device and method of manufacture

• US 4,617,608 A
• Filed: 06/13/1985
• Issued: 10/14/1986
• Est. Priority Date: 12/28/1984
• Status: Expired

• Current Assignee: Bell Telephone Laboratories, Inc. (Nokia Corporation)
• Original Assignee: AT&T, Inc.
• Inventors: Lamola, Angelo A., Blonder, Greg E., Lieberman, Robert A.
• Primary Examiner(s): Griffin, Donald A.
• Application Number:
  US06/744,382
• Time in Patent Office: 488 Days
• Field of Search: 361/280, 361/283, 361/287, 361/290, 361/291, 29/25.42, 29/588, 250/231 P, 73/705, 73/717
• US Class Current: 361/291
• CPC Class Codes: G01L 9/0072 using variations in capacitance
• CPC Class Codes: G02B 6/266 the optical element being an attenuator
• CPC Class Codes: G02B 6/352 the reflective optical element having a shaped reflective surface, e.g. a reflective element comprising several reflective surfaces or facets that function together
• CPC Class Codes: G02B 6/355 1x2 switch, i.e. one input and a selectable single output of two possible outputs
• CPC Class Codes: G02B 6/3552 1x1 switch, e.g. on/off switch
• CPC Class Codes: G09F 9/372 the positions of the elements being controlled by the application of an electric field
• CPC Class Codes: H01G 5/16 using variation of distance between electrodes
• CPC Class Codes: Y10T 29/435 Solid dielectric type

Abstract

A variable gap device which comprises a suitable material with a cavity formed therein mounted over a body. Elements are formed on the surface of the body and on the top surface of the cavity. In one embodiment, the elements are electrodes of a variable capacitance device, and in another embodiment the elements are partial or total reflectors of incident light from an optical fiber. The surface of the cavity opposite the body is preferably flat and of the order of microns from the body.

The device is fabricated by forming a removable layer over a temporary substrate. An appropriate element pattern is formed over the removable layer and the layer is etched in a configuration which will define the cavity. The deformable material is encapsulated over this structure and then removed from the substrate with the element remaining in the cavity. Any removable material remaining in the cavity can then be etched away.

Claims

1. A method of fabricating a variable gap device comprising the steps of:

forming a removable layer over a substrate;

forming a first element over the removable layer;

removing portions of the removable layer which are not covered by the element;

forming a material over the substrate so as to encapsulate the element and the remaining portion of the removable layer thereunder; and

separating the material from the substrate and removing the remaining portion of the removable layer so as to form a cavity in the material with the element adhering to the top surface of the cavity.

2. The method according to claim 1 wherein the removable layer comprises a photoresist material.

3. The method according to claim 1 wherein the material which encapsulates the element comprises a rubber material.

4. The method according to claim 3 further comprising the step of mounting the material with the cavity and element formed therein over a substrate which includes a second element so that the cavity is aligned over the second element.

5. The method according to claim 4 wherein the material is made to adhere to the substrate surface by means of van der Waals attraction.

6. The method according to claim 4 wherein the material is sealed to the substrate surface.

7. The method according to claim 1 or 4 wherein the elements are electrodes so as to fabricate a variable capacitance device.

8. The method according to claim 4 wherein the second element is a partially reflecting element and the substrate is an optical fiber.

9. The method according to claim 1 wherein the encapsulating material is separated from the substrate by means of a parting layer formed over the substrate prior to forming the removable layer.

10. The method according to claim 9 wherein the parting layer comprises a metal.

11. The method according to claim 10 wherein the encapsulating material is separated from the substrate by immersing the structure in a bath so that the metal layer is dissolved in the bath.

12. The method according to claim 1 wherein the element is formed over the removable layer by depositing a metal over essentially the entire surface of the removable layer and defining the element photolithographically.

13. The method according to claim 1 wherein the rubber is cured at room temperature.

14. The method according to claim 1 wherein the first element is a totally reflecting element.

15. A variable gap device comprising:

a first body including a first element formed on one surface thereof;

a second body mounted to the first body, the said second body including a cavity formed therein which has a surface opposite the said first element;

a second element formed on said surface of the cavity opposite the first element to form a gap between the elements, at least one of said bodies being flexible so that the body can be deformed and the gap between elements can be varied, while the gap in the undeformed state is no greater than 30 μ

m; and

an optical fiber mounted with respect to the first and second elements so that light from a core of said fiber will be incident on at least a portion of said elements.

16. The device according to claim 15 wherein one of the bodies comprises said optical fiber.

17. The device according to claim 16 wherein one of the elements is a partial reflector of light from the fiber, and the other element is a total reflector of light from the fiber.

18. The device according to claim 15 wherein the first body comprises an optical fiber, the second body is the flexible material, the first element is a partial reflector of light from the fiber, and the second element is a total reflector of light from the fiber.

19. A variable capacitance device comprising:

a first body including a first electrode formed on one surface thereof, said electrode comprising two interdigitated electrode portions which are capacitively coupled together;

a second body mounted over the first body, the said second body including a cavity formed therein which is positioned over said first electrode and which has a surface opposite the said electrode;

at least one of said bodies being flexible so that the body can be deformed and the gap between the said surface of the cavity and the electrode portions can be varied while the gap in the undeformed state is no greater than 30 μ

m.

20. The device according to claim 19 further comprising a second electrode formed on said surface of the cavity opposite the first electrode so that the interdigitated portions are capacitively coupled together through the second electrode.

21. A variable capacitance device comprising:

a first body including a first electrode formed on one surface thereof;

a second body mounted over the first body, the said second body including a cavity formed therein which is positioned over said first electrode and which has a surface opposite the said electrode;

a second electrode formed on said surface of the cavity opposite the first electrode, at least one of said bodies being flexible so that the body can be deformed and the gap between the electrodes can be varied while the gap in the undeformed state is no greater than 30 μ

m;

each of said electrodes being u-shaped and surrounding a switch contact electrode electrically isolated therefrom.

22. A variable capacitance device comprising:

a first body including a first electrode formed on one surface thereof;

a second body mounted over the first body, the said second body including a cavity formed therein which is positioned over said first electrode and which has a surface opposite the said electrode;

a second electrode formed on said surface of the cavity opposite the first electrode, at least one of said bodies being flexible so that the body can be deformed and the gap between the electrodes can be varied while the gap in the undeformed state is no greater than 30 μ

m; and

optical fibers formed between the first and second bodies with their ends positioned so that light can be coupled between the fibers while the bodies are undeformed and light is decoupled when one of said bodies is deformed.

23. A variable capacitance device comprising:

a first body including a first electrode formed on one surface thereof;

a second body mounted over the first body, the said second body including a cavity formed therein which is positioned over said first electrode and which has a surface opposite the said electrode;

a second electrode formed on said surface of the cavity opposite the first electrode, at least one of said bodies being flexible so that the body can be deformed and the gap between the electrodes can be varied while the gap in the undeformed state is no greater than 30 μ

m; and

at least three optical fibers formed through one of the bodies with their ends positioned so that light from a first fiber will be coupled to a second fiber when the bodies are undeformed and light from the said first fiber will be coupled to a third fiber when one of the bodies is deformed.

24. A variable capacitance device comprising:

a first body including a first electrode formed on one surface thereof;

a second body mounted over the first body, the said second body including a cavity formed therein which is positioned over said first electrode and which has a surface opposite the said electrode; and

a second electrode formed on said surface of the cavity opposite the first electrode, at least one of said bodies being flexible so that the body can be deformed and the gap between the electrodes can be varied while the gap in the undeformed state is no greater than 30 μ

m;

at least one of the bodies being transparent and at least one electrode being at least semi-transparent so that when light is incident through one of the bodies, the light emerging from the device will have different wavelengths due to interference effects depending upon whether the device is deformed or undeformed.

25. The device according to claim 24 further comprising an insulating layer formed over the first electrode.

26. The device according to claim 24 wherein the device has two stable states when the body is deformed for a particular voltage applied across the electrodes.

27. The device according to claim 26 wherein the second body is flexible and the top electrode includes a plurality of portions which are separated by stubs extending from the second body into the cavity.

28. The device according to claim 26 wherein the first electrode includes a plurality of portions and the second electrode includes a plurality of portions which are disposed to extend in the spaces between the first electrode portions when one of the bodies is deformed.

29. A method of fabricating a variable gap device comprising the steps of:

forming a removable layer over a substrate;

removing portions of the removable layer;

forming a material over the substrate so as to encapsulate the remaining portion of the removable layer; and

separating the material from the substrate and removing the remaining portion of the removable layer so as to form a cavity in the material determined by the dimensions of said portion of the removable layer.