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Interferometric contact-free measuring method for sensing motional surface deformation of workpiece subjected to ultrasonic wave vibration

  • US 4,619,529 A
  • Filed: 01/04/1983
  • Issued: 10/28/1986
  • Est. Priority Date: 01/12/1982
  • Status: Expired due to Fees
First Claim
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1. In interferometric contact-free measuring method for sensing motional surface deformation of a workpiece subject to ultrasonic vibration comprising the steps of:

  • impinging a first pulse laser beam on a surface of the workpiece to induce an ultrasonic wave in the workpiece, longitudinal ultrasonic pulses induced in a thickness of the workpiece generating echoes,generating a second laser beam,splitting the second laser beam into a measuring beam and a reference beam,causing the measuring beam to impinge upon the measuring point on the workpiece surface,causing the reference beam to impinge upon a reference beam point on the workpiece surface separate and distinct from the measuring point, the distance between the measuring and reference points being such that an echo of a second pulse of said laser beam reaches the measuring point before a first pulse reaches the reference point, andcausing the measuring and reference beams reflected from the workpiece surface at the measuring point and the reference point, respectively, to impinge upon the same optical detector.

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