Manufacture of integrated optical waveguides
First Claim
1. A method of manufacturing an integrated optical waveguide in which the waveguide is composed of glass deposited in a first layer on a substrate by a chemical vapour deposition process wherein a chemical reaction for effecting the deposition process is initiated by means of a plasma produced in a reaction zone by a microwave cavity and supplied with power from a microwave generator.
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Accused Products
Abstract
Integrated optical waveguides, for example planar waveguides with stripes of guiding material formed integrally on a substrate, are manufactured by depositing the doped glass guiding material by plasma chemical vapor deposition. Several substrates can be arranged in a suitably shaped apparatus so that deposition can take place on all of them at once.
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Citations
12 Claims
- 1. A method of manufacturing an integrated optical waveguide in which the waveguide is composed of glass deposited in a first layer on a substrate by a chemical vapour deposition process wherein a chemical reaction for effecting the deposition process is initiated by means of a plasma produced in a reaction zone by a microwave cavity and supplied with power from a microwave generator.
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8. A method of manufacturing an integrated optical waveguide, comprising the steps of:
- mounting a substrate within an opening in a wall of a reaction tube with one face of the substrate exposed to the interior of the tube;
supporting the reaction tube within an outer tube so that the reaction tube surrounds a perforated inner tube;
introducing into the reaction tube through perforations in the inner tube a gaseous mixture having oxygen and at least one vapor capable of reacting therewith to produce a glass;
maintaining the pressure within the reaction tube at a low pressure;
heating the substrate; and
producing a plasma column within the reaction tube at least over the region occupied by the substrate by means of a microwave cavity and supplied with power from a microwave generator, so as to cause a chemical reaction to take place within the reaction tube and a layer of glass to be deposited on said one face of the substrate. - View Dependent Claims (9, 10, 11, 12)
- mounting a substrate within an opening in a wall of a reaction tube with one face of the substrate exposed to the interior of the tube;
Specification