Method of forming a data storage medium and data storage device by congruent sublimation
First Claim
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1. A method of depositing a multi-component, phase changeable, chalcogenide material onto a substrate, comprising the steps of:
- a. providing in a vacuum deposition means a substantially non-convecting, multi-component, congruently vaporizing chalcogenide first source;
b. converting the first source to a non-condensed state having substantial source/non-condensed state compositional equivalence; and
c. depositing material from the non-condensed state onto the substrate to form a deposit having substantial non-condensed state/deposit compositional equivalence and the substantial absence of concentration gradients.
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Abstract
Disclosed is an optical data storage device and a method of making the device. The device has a thin film of a multi-component, phase changeable, chalcogenide material. The thin film is prepared by vacuum deposition of a substantially non-convecting, multi-component, chalcogenide containing first source. The multicomponent source is converted to a non-condensed state, and the non-condensed material is deposited onto the substrate to form a deposit having substantial source/deposit compositional equivalence and the substantial absence of concentration gradients.
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Citations
25 Claims
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1. A method of depositing a multi-component, phase changeable, chalcogenide material onto a substrate, comprising the steps of:
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a. providing in a vacuum deposition means a substantially non-convecting, multi-component, congruently vaporizing chalcogenide first source; b. converting the first source to a non-condensed state having substantial source/non-condensed state compositional equivalence; and c. depositing material from the non-condensed state onto the substrate to form a deposit having substantial non-condensed state/deposit compositional equivalence and the substantial absence of concentration gradients. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An optical data storage device having a layer of a multicomponent, phase changeable, chalcogenide material on a substrate, said layer being deposited by the method comprising:
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a. providing in a vacuum deposition means a substantially non-convecting, multi-component, congruently vaporizing chalcogenide first source, b. converting the chalcogenide first source to a non-condensed state having substantial source/non-condensed state compositional equivalence; and c. depositing material from the non-condensed state onto the substrate to form a deposit having substantial non-condensed state/deposit compositional equivalence and the substantial absence of concentration gradients. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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Specification