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Three dimensional imaging method and device

  • US 4,627,734 A
  • Filed: 01/16/1986
  • Issued: 12/09/1986
  • Est. Priority Date: 06/30/1983
  • Status: Expired due to Term
First Claim
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1. In a method of determining the profile of a surface relative to a reference plane, comprising projecting a beam of radiation to strike an area of the surface and detecting a beam reflected by such surface area, portions of the projected and detected beams that intersect at said area defining a beam plane that intersects the reference plane along a direction X;

  • the improvement comprising synchronously scanning said beam portions in the beam plane to move in the direction X the surface area at which said beam portions intersect, whereby each detected position of the detected beam in the direction X represents a deviation of a respective said area from the reference plane in a direction Z perpendicular to the reference plane.

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