Capacitive detector for absolute pressure

• US 4,628,403 A
• Filed: 02/15/1985
• Issued: 12/09/1986
• Est. Priority Date: 02/21/1984
• Status: Expired due to Term

• Current Assignee: Vaisala OY
• Original Assignee: Vaisala OY
• Inventors: Kuisma, Heikki T.
• Primary Examiner(s): GRIFFIN, DONALD
• Application Number:
  US06/701,857
• Time in Patent Office: 662 Days
• Field of Search: 73/718, 73/724, 361/283
• US Class Current: 361/283.4
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm

Abstract

A capacitive detector for absolute pressure, which comprises a base and a stationary capacitor plate (7) attached onto the base (3). An aneroid capsule (4) is arranged in connection with the base (3) and provided with a mobile capacitor plate area (5, 6) directed towards the base (3) and changing its distance from the stationary capacitor plate (7) by the effect of pressure. A silicon plate (2) is attached onto the base and has membrane-like middle portion (5, 6) acting as a mobile capacitor plate. A plate structure (1) is attached hermetically onto the silicon plate (2) such that the space of the aneroid capsule (4) is located between the plate structure (1) and the silicon plate (2).

Claims

1. A capacitive detector for the measurement of the absolute pressure of a medium, which comprises:

a first insulating plate functioning as a base;

a stationary capacitor plate attached onto said first insulating plate;

a silicon plate attached onto said first insulating plate and having a thin, membrane-like middle portion functioning as a mobile capacitor plate and defining a chamber between itself and said first insulating plate, and a channel allowing free entrance of the medium into said chamber;

a second insultating plate attached hermetically onto said silicon plate so as to define an aneroid capsule between itself and said membrane-like middle portion, the distance of said membrane-like middle portion from said stationary capacitor plate being a function of the absolute pressure to be measured;

a first terminal arranged outside said silicon plate in conductive contact therewith, and

a second terminal arranged outside said silicon plate; and

a conductor electrically connecting said second terminal with said stationary capacitor plate through said channel.

2. A detector as claimed in claim 1, wherein said first and the second plate structure are glass plates.

3. A detector as claimed in claim 1, wherein said membrane-like middle portion comprises a rigid central area.

4. A detector as claimed in claim 1, wherein said membrane-like middle portion is at least substantially of uniform thickness.

5. A detector as claimed in claim 1, wherein said space of the aneroid capsule is at least partly worked into the face of said silicon plate, which faces the second plate structure.

6. A detector as claimed in claim 1, wherein the space of the aneroid capsule is at least partly worked into the face of said second plate structure, which faces the silicon plate.

7. A detector as claimed in claim 1, wherein the air gap between the electrodes is at least partly worked into the face of said silicon plate, which faces the first plate structure.

8. A detector as claimed in claim 1, wherein the air gap between the electrodes is at least partly worked into the face of said first plate structure, which faces the silicon plate.