Sensing apparatus

• US 4,629,957 A
• Filed: 03/22/1985
• Issued: 12/16/1986
• Est. Priority Date: 03/27/1984
• Status: Expired due to Fees

• Current Assignee: Thorn EMI Patents Limited
• Original Assignee: EMI (Entegris Incorporated)
• Inventors: Williams, Anthony M., Walters, Peter E.
• Primary Examiner(s): Shoop, Jr., William M.
• Assistant Examiner(s): BERGMANN, SAUL
• Application Number:
  US06/714,922
• Time in Patent Office: 634 Days
• Field of Search: 318/662, 357/26, 357/23.15, 901/45, 901/46
• US Class Current: 318/662
• CPC Class Codes: G01B 7/012 Contact-making feeler heads therefor
• CPC Class Codes: H01L 29/84 controllable by variation of applied mechanical force, e.g. of pressure

Abstract

A sensing apparatus has a probe displacement with respect to a support arm and to a reference position. The probe has a flat disc mounting three transducers which are spaced apart from one another at regular intervals. Each transducer has an elastomeric dielectric and is capable of producing an electrical output signal in response to displacement of the probe from the reference position. An electrical circuit compares output signals produced by the transducers and evaluates the direction and/or extent of probe displacement. Such evaluation may be used in the manipulator control system of an article-handling equipment.

Claims

1. An apparatus for sensing contact with an article, the apparatus comprising a support member, a probe displaceable with respect to the support member and to a reference position in response to contact with an article, and three or more pressure sensitive capacitative transducers arranged in spaced apart relationship between the support member and the probe,

wherein each said pressure sensitive capacitative transducer includes an elastomeric dielectric material and is capable of producing a detectable electrical signal in response to a displacement of the probe from the reference position.

2. A sensing apparatus according to claim 1 wherein the transducers are mounted on a common surface of the probe.

3. A sensing apparatus according to claim 2 wherein the transducers are mounted on a planar surface orthogonal to the longitudinal axis of the probe.

4. A sensing apparatus according to claim 3 wherein the transducers are spaced apart from one another at regular intervals around the longitudinal axis.

5. A sensing apparatus according to claim 3 including means to allow displacement of the probe, in relation to the support along said longitudinal axis.

6. A sensing apparatus according to claim 5 including resilient means to resist displacement along the longitudinal axis.

7. A sensing apparatus according to Claim 1 including a processing circuit responsive to electrical signals produced simultaneously by the transducer to evaluate the direction and/or extent of probe displacement with respect to said reference position.

8. A sensing apparatus according to claim 1 wherein each said capacitative transducer comprises a field effect transistor device provided with an elastomeric dielectric material between the gate insulator and the gate electrode of the device.

9. An article-handling equipment comprising a work station at which an article can be held, an apparatus for sensing contact with the article, the apparatus comprising a support member, a probe displaceable with respect to the support member and to a reference position in response to contact with the article,

and three or more pressure sensitive capacitative transducers arranged in spaced apart relationship between the support and the probe,

wherein each said pressure sensitive capacitative transducer includes an elastomeric dielectric material and is capable of producing a detectable electrical signal in response to a displacement of the probe from the reference position,

and control means to cause relative movement of the probe and article in dependence in electrical signals produced by one or more of the transducers.

10. An article-handling equipment according to claim 9 wherein said control means is effective to cause the probe to return to the reference position.