Vacuum load lock apparatus

• US 4,632,624 A
• Filed: 03/09/1984
• Issued: 12/30/1986
• Est. Priority Date: 03/09/1984
• Status: Expired due to Term

• Current Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Original Assignee: Tegal Corp. (Rennova Health, Inc.)
• Inventors: Zajac, John, Mirkovich, Ninko T.
• Primary Examiner(s): Spar, Robert J.
• Assistant Examiner(s): Millman, Stuart J.
• Application Number:
  US06/588,027
• Time in Patent Office: 1,026 Days
• Field of Search: 414/217, 414/287, 414/222, 414/225, 118/50, 118/500, 118/719, 118/728, 118/729, 118/733
• US Class Current: 414/217
• CPC Class Codes: H01J 37/20 Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support introducing the objects H01J37/18
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: H01L 21/67346 characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
• CPC Class Codes: H01L 21/67745 characterized by movements or sequence of movements of transfer devices
• CPC Class Codes: H01L 21/67748 horizontal transfer of a single workpiece
• CPC Class Codes: Y10S 414/137 including means for charging or discharging wafer cassette
• CPC Class Codes: Y10S 414/139 including wafer charging or discharging means for vacuum chamber

Abstract

A multi-wafer load lock apparatus for use in wafer processing machines provides access to wafers in an internal cassette by orthogonal wafer transport devices. Upper and lower bell jars, which seal to a sealing plate, provide access to the cassette by outside and vacuum transport mechanisms, respectively. A right angle passthrough cassette allows orthogonal access. An improved vacuum feedthrough actuates both the upper bell jar and the internal cassette.

Claims

1. A load lock apparatus comprising:

a plate having a central aperture and vents for connecting said aperture to an evacuation system;

a lower bell jar adapted to seal to said plate around said aperture;

an upper ball jar adapted to seal to said plate around said aperture; and

a wafer cassette adapted to be enclosed between said upper and lower bell jars.

2. A load lock apparatus according to claim 1 wherein:

said cassette is movable between a first position generally below said plate and a second position generally above said plate, and said cassette being accessible by an outside wafer transfer apparatus when in said first position and being accessible by a vacuum wafer transport apparatus when in said second position.

3. A load lock apparatus according to claim 1 wherein:

said lower bell jar is adapted to serve as a collection and removal device for wafer fragments.

4. A load lock apparatus according to claim 2 further comprising:

means for moving said lower bell jar between raised and lowered positions, said lower bell jar being sealed against said plate when in said raised position;

means for moving said upper bell jar between raised and lowered positioned, said upper bell jar being sealed against said plate when in said lower position; and

means for moving said wafer cassette separately from said upper bell jar.

9. A load lock apparatus as set forth in claim 4 wherein said means for moving said upper bell jar comprises a pneumatic cylinder and piston coupled to said upper bell jar by a sleeve and wherein said means for moving said wafer cassette comprises a motor and lead screw coupled to said wafer cassette by a nut and slider located in said sleeve.

5. In a wafer processing machine having an outside wafer transfer apparatus for loading and unloading multi-wafer cassettes and a vacuum wafer transport mechanism for moving wafers inside an evacuated portion of the machine, a load lock apparatus comprising:

a plate having an aperture therein and vent holes opening into said aperture;

a first bell jar adapted to seal against a first side of said plate around a periphery of said aperture;

a second bell jar adapted to seal against a second side of said plate around a periphery of said aperture;

a multi-wafer cassette adapted to be enclosed between said first and second bell jars and to pass through said aperture in said plate.

6. A load lock apparatus according to claim 5 wherein:

said second bell jar and said plate preserve the integrity of the evacuated portion of the machine when said first bell jar is not sealed against said plate and said first bell jar and said plate preserve the integrity of the evacuated portion of the machine when said second bell jar is not sealed against said plate.

7. A load lock apparatus according to claim 5 wherein:

said outside wafer transfer apparatus has access to said cassette when said cassette is at least partially on said first side of said plate and said vacuum wafer transport mechanism has access to said cassette when said cassette is at least partially on said second side of said plate.

8. A load lock apparatus according to claim 5 further comprising:

a pneumatic cylinder and piston apparatus, said second bell jar being coupled to said piston by means of a sleeve;

a motor and lead screw apparatus, said multi-wafer cassette being coupled to said lead screw by means of a nut and slider arrangement located in said sleeve; and

means for sealing said sleeve and slider for vacuum containment.