Moisture sensor
First Claim
1. A moisture sensor comprising a substrate, a bottom electrode formed on said substrate, a moisture sensitive film formed on said bottom electrode and a moisture permeable electrode formed on said moisture sensitive film, said moisture sensitive film being formed by high crystallizable polyvinyl alcohol which is heat treated thereby attaining a linear relationship between the impedance and the relative humidity ranging from 0% to 90% of the relative humidity.
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Accused Products
Abstract
A moisture sensor comprising a substrate, a bottom electrode formed on said substrate, a moisture sensitive film formed on said bottom electrode and a moisture permeable electrode formed on said moisture sensitive film, said moisture sensitive film being formed by heat-treating polyvinyl alcohol, thereby exhibiting a moisture sensitive characteristic which has a linear relationship between the impedance and the relative humidity.
20 Citations
2 Claims
- 1. A moisture sensor comprising a substrate, a bottom electrode formed on said substrate, a moisture sensitive film formed on said bottom electrode and a moisture permeable electrode formed on said moisture sensitive film, said moisture sensitive film being formed by high crystallizable polyvinyl alcohol which is heat treated thereby attaining a linear relationship between the impedance and the relative humidity ranging from 0% to 90% of the relative humidity.
Specification