IR imaging array and method of making same
First Claim
1. An array of infra-red detectors comprisinga substrate of single crystal silicon of one conductivity type,a plurality of spaced apart detector areas of a conductive material at one surface of said substrate with each of said conductive areas forming a Schottky-barrier junction with said substrate,each conductive area including a conductive coupling region of a conductivity type opposite to that of the substrate within the substrate under and in contact with a portion of the conductive material, andmeans between adjacent detector areas isolating said areas from each other, said isolating means consisting of a region of a conductivity type opposite to that of the substrate in said substrate and extending along said one surface between said areas with each of said areas contacting said region, said region extending around the conductive areas and being spaced from the coupling regions.
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Accused Products
Abstract
An array of infra-red (IR) detectors for a CCD image sensor includes a plurality of spaced areas of a conductive material at the surface of a substrate of semiconductor material of one conductivity type with each conductive area forming a Schottky-barrier diode with the substrate to form the IR detectors. Each detector includes a high conductivity contact region within the substrate. Between the detector area is a guard band which consists of a region of a conductivity type opposite to that of the substrate within the substrate and around said detector area. The guard band is spaced from the contact regions and each conductive area overlaps a portion of its adjacent guard band.
33 Citations
7 Claims
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1. An array of infra-red detectors comprising
a substrate of single crystal silicon of one conductivity type, a plurality of spaced apart detector areas of a conductive material at one surface of said substrate with each of said conductive areas forming a Schottky-barrier junction with said substrate, each conductive area including a conductive coupling region of a conductivity type opposite to that of the substrate within the substrate under and in contact with a portion of the conductive material, and means between adjacent detector areas isolating said areas from each other, said isolating means consisting of a region of a conductivity type opposite to that of the substrate in said substrate and extending along said one surface between said areas with each of said areas contacting said region, said region extending around the conductive areas and being spaced from the coupling regions.
Specification