Fringe scanning shearing interferometer

• US 4,643,576 A
• Filed: 04/18/1985
• Issued: 02/17/1987
• Est. Priority Date: 04/19/1984
• Status: Expired due to Fees

• Current Assignee: Ricoh Company Limited
• Original Assignee: Ricoh Company Limited
• Inventors: Kouchiwa, Taira, Kanoh, Toshio
• Primary Examiner(s): LaRoche, Eugene R.
• Assistant Examiner(s): MIS, DAVID C
• Application Number:
  US06/724,397
• Time in Patent Office: 670 Days
• Field of Search: 356/353, 356/359, 356/360
• US Class Current: 356/513
• CPC Class Codes: G01B 9/02098 Shearing interferometers
• CPC Class Codes: G01J 9/0215 by shearing interferometric methods
• CPC Class Codes: G01M 11/005 Testing of reflective surfaces, e.g. mirrors

Abstract

A fringe scanning shearing interferometer includes a converter lens for converting a wavefront reflected by an object under test illuminated with light into an approximately parallel wavefront, a beam splitter for dividing the approximately parallel wavefront into first and second wavefronts travelling in two directions, a pair of first and second prisms disposed respectively adjacent to the beam splitter in equally spaced relation thereto, a displacement mechanism for displacing the first prism in a direction normal to the direction in which the first wavefront falls on the first prism, a shearing device for slightly displacing the second prism in the same direction as that in which the second wavefront falls on the second prism, a photodetector, and a focusing lens for focusing the first and second wavefronts having passed respectively through the first and second prism, on the photodetector to produce interference fringes thereon.

Claims

1. A fringe scanning shearing interferometer comprising:

(a) converter means for converting a wavefront reflected by an object under test, illuminated with light, into an approximately parallel wavefront;

(b) splitter means for dividing said approximately parallel wavefront into first and second wavefronts travelling in two directions;

(c) a pair of first and second optical path changing means which conduct the first and second wavefronts, respectively, and are disposed respectively adjacent to said splitter means in equally spaced relation thereto;

(d) displacement means for displacing said first optical path changing means in a direction normal to the direction in which said first wavefront falls on said first optical path changing means;

(e) shearing means for slightly displacing said second optical path changing means in the same direction as that in which second wavefront falls on said second optical path changing means;

(f) a photodetector; and

(g) a focusing lens for focusing said first and second wavefronts, which have passed respectively through said first and second optical path changing means and have been directed thereby so that they can be focused by said focusing lens, on said photodetector to produce interference fringes thereon.

2. A fringe scanning shearing interferometer according to claim 1, wherein said object under test has a surface which comprises one of a flat surface, a spherical surface, and an aspherical surface.

3. A fringe scanning shearing interferometer according to claim 1, wherein said object under test comprises an optical device measured for one of a wavefront aberration, a degree of eccentricity, and a focal length thereof.

4. A fringe scanning shearing interferometer according to claim 1, wherein said light falling on said object comprises coherent light.

5. A fringe scanning shearing interferometer according to claim 4, wherein said coherent light comprises a laser beam.

6. A fringe scanning shearing interferometer according to claim 1, wherein said converting means comprises a converter lens for converting a parallel light beam into a spherical wave lying on a reference spherical surface.

7. A fringe scanning shearing interferometer according to claim 6, wherein said reference spherical surface has a radius equal to a distance from the focal point of said converter lens to the vertex of a curved surface under test of said object on an optical axis thereof.

8. A fringe scanning shearing interferometer according to claim 1, wherein said splitter means comprises a beam splitter having a mirror surface inclined 45°

with respect to the direction in which said approximately parallel wavefront travels.

9. A fringe scanning shearing interferometer according to claim 1, wherein each of first and second optical path changing means comprises a right-angled prism.

10. A fringe scanning shearing interferometer according to claim 9, wherein said right-angled prism has reflecting roof surfaces disposed to reflect back one of said first and second wavefronts which fall on the right-angled prism.

11. A fringe scanning shearing interferometer according to claim 9, wherein said displacement means comprises a step motor having a shaft, a screw shaft coupled coaxially to said shaft of the step motor, and a frame threaded over said screw shaft and connected to said right-angled prism of said first optical path changing means.

12. A fringe scanning shearing interferometer according to claim 9, wherein said displacement means comprises a piezoelectric device.

13. A fringe scanning shearing interferometer according to claim 9, wherein said shearing means comprises a piezoelectric device coupled to said right-angled prism of said second optical path changing means.

14. A fringe scanning shearing interferometer according to claim 1, wherein each of first and second optical path changing means comprises a conical corner-cube prism having three roof angles and disposed to reflect back one of said first and second wavefronts along an axis precisely parallel to the incident axis of the wavefront.

15. A fringe scanning shearing interferometer according to claim 14, wherein said displacement means comprises a pair of step motors having respective shafts, a pair of screw shafts coupled coaxially to said shafts of the step motors and extending at at a right angle with respect to each other, and a pair of frames threaded over said screw shafts and connected to said corner-cube prism of said first optical path changing means, whereby said first optical path changing means can be displaced in two orthogonal directions lying in a plane normal to the direction in which said first wavefront falls on said first optical path changing means.

16. A fringe scanning shearing interferometer according to claim 14, wherein said displacement means comprises a piezoelectric device coupled to said corner-cube prism of said first optical path changing means.

17. A fringe scanning shearing interferometer according to claim 14, wherein said shearing means comprises a step motor having a shaft, a screw shaft coupled coaxially to said shaft of the step motor, and a frame threaded over said screw shaft and connected to said corner-cube prism of said second optical path changing means.

18. A fringe scanning shearing interferometer according to claim 14, wherein said shearing means comprises a piezoelectric device coupled to said corner-cube prism of said second optical path changing means.