Capacitive type converter device

• US 4,644,798 A
• Filed: 08/28/1985
• Issued: 02/24/1987
• Est. Priority Date: 09/06/1984
• Status: Expired due to Fees

• Current Assignee: Yokogawa Electric Corporation
• Original Assignee: Yokogawa Hokushin Electric Corp.
• Inventors: Ogawa, Tadahiro, Tamura, Hisashi, Hirata, Terutaka, Odohira, Tetsu
• Primary Examiner(s): Woodiel, Donald O.
• Application Number:
  US06/770,664
• Time in Patent Office: 545 Days
• Field of Search: 73/708, 73/718, 73/724, 331/65, 361/283
• US Class Current: 73/708
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass
• CPC Class Codes: G01L 9/125 with temperature compensating means non electric temperature compensating means G01L19/04

Abstract

A capacitive type converter device, such as used for measuring pressure, comprising first and second rectifying circuits, each including an operational amplifier with a non-inverting input terminal connected to a reference point, to which a variable condenser is connected, the variable condenser having a capacitance which varies in response to a force being measured, such as pressure, and to which a reference condenser is connected, the reference condenser having a capacitance which is fixed independent of the force being measured. The device further comprises an oscillator, whose oscillation output is applied to the variable and reference condensers,and which is controlled by a control means in response to output of the first rectifying circuit, or in response to the output of the second rectifying circuit together with the output of the first rectifying circuit, whereby an output responsive to the capacitance of the variable condenser is obtained from the output of the second rectifying circuit, or an output relating to the difference between the capacitances of the condensers is obtained from the outputs of the first and second rectifying circuits. The device eliminates adverse influences of stray capacitances, non-linearity, offset signals, and parallel capacitances and forward voltages.

Claims

1. A capacitive type converter device comprising

variable condenser having a capacitance variable in response to a value to be measured;

reference condenser having a capacitance fixed independent of said value to be measured;

oscillator means for supplying an oscillation output to said variable condenser and to said reference condenser;

first rectifying circuit comprising an operational amplifier having an inverting input terminal connected to said variable condenser, and having a non-inverting input terminal connected to a reference point, said first rectifying circuit producing an output;

second rectifying circuit for rectifying a current flowing through said reference condenser, said second rectifying circuit producing an output; and

control means for controlling said oscillation output of said oscillation means in response to said output of said first rectifying circuit or in response to said output of said second rectifying circuit together with said output of said first rectifying circuit, whereby an output signal representative of the capacitance of said variable condenser is obtained from said second rectifying circuit, or an output signal representative of the difference between the capacitance of said reference condenser and the capacitance of said variable condenser is obtained from said outputs of said first and second rectifying circuits.

2. The device of claim 1, wherein said variable condenser comprises a movable electrode, a fixed electrode and a guard electrode, said movable electrode being displaced in response to said value to be measured, to vary the capacitance between said movable electrode and said fixed electrode;

and wherein said reference condenser comprises a pair of fixed electrodes and a fixed capacitance therebetween; and

wherein said guard electrode of said variable condenser is located on the same side as said fixed electrode and is connected to said reference point.

3. The device of claim 2, wherein said variable condenser, and said reference condenser are mounted on a unitary structure comprising an electrode having a portion serving as said movable electrode of said variable condenser and a portion serving as said fixed electrode of said reference condenser and connected to said reference point, a first circular electrode being another electrode of said variable condenser, a second circular electrode being another fixed electrode of said reference condenser, and a third circular electrode located between said first and second circular electrodes and being said guard electrode.

4. The device of claim 1, wherein

said first rectifying circuit comprises an operational amplifier having an inverting input terminal connected to said variable condenser, a non-inverting input terminal connected to said reference point, and an output terminal;

and a feedback circuit connecting said output terminal to said inverting input terminal, said feedback circuit comprising rectifying diodes and a smoothing circuit;

said second rectifying circuit comprises an operational amplifier having an inverting input terminal connected to said reference condenser, a non-inverting input terminal connected to said reference point, and an output terminal; and

a feedback circuit connected between said output terminal and said inverting input terminal, said feedback circuit comprising rectifying diodes and as smoothing circuit; and

wherein said control means controls oscillation output of said oscillator means to maintain unchanged said output of said first rectifying circuit.

5. The device of claim 1, wherein

said first rectifying circuit comprises a first charge converter having an input circuit connected to said variable condenser for outputting an AC voltage of an amplitude representative of said capacitance of said variable condenser, and a feedback circuit;

a first compensation diode circuit connected in said feedback circuit of said first charge converter;

a first fixed condenser of a predetermined capacitance, means for applying an output of said first charge converter to said first fixed condenser; and

a first rectifying means including diodes for rectifying an alternating current flowing through said first fixed condenser;

said second rectifying circuit comprises a second charge converter having input circuit connected to said reference condenser for outputting an AC voltage of an amplitude representative of said capacitance of said reference condenser, and a feedback circuit;

a second compensation diode circuit connected to said feedback circuit of said second charge converter;

a second fixed condenser of a predetermined capacitance;

means for applying an output of said second charge converter to said second fixed condenser; and

a second rectifying means including diodes for rectifying an alternating current flowing through said second fixed condenser;

said control means controlling said oscillation output of said oscillator means so that a current obtained through the rectifying action of said first rectifying circuit and representative of said capacitance of said variable condenser defines a given value, thereby to produce an output signal representative of the difference between a current obtained through the rectifying action of said second rectifying circuit and representative of said capacitance of said reference condenser, and a current obtained through the rectifying action of said first rectifying circuit and representative of said capacitance of said variable condenser.

6. The device of claim 1, wherein said control means controls said oscillator means to maintain unchanged a current corresponding to the difference between said capacitance of said variable condenser of said capacitance of said reference condenser.

7. The device of claim 1, wherein said control means controls said oscillator means to maintain unchanged the sum of a direct current representative of said capacitance of said variable condenser and positive and negative direct currents representative of said capacitance of said reference condenser, thereby to generate an output signal representative of a current corresponding to the difference between said capacitance of said reference condenser and said capacitance of said variable condenser.

8. The device of claim 1, wherein

said first rectifying circuit comprises a first charge converter for rectifying and smoothing an alternating current flowing through said variable condenser and for generating a positive DC voltage and a negative DC voltage representative of said capacitance of said variable condenser, and a first high input impedance differential amplifying circuit for amplifying the difference between said positive DC voltage and said negative DC voltage of said first charge converter;

and

said second rectifying circuit comprises a second charge converter for rectifying and smoothing an alternating current flowing through said reference condenser, and for generating a positive DC voltage and a negative DC voltage representative of said capacitance of said reference condenser, and a second high input impedance differential amplifying circuit for amplifying the difference between said positive DC voltage and said negative DC voltage of said second charge converter.

9. The device of claim 1, wherein

said first rectifying circuit comprises a first charge converter having an input circuit connected to said variable condenser for generating an AC voltage of an amplitude representative of said capacitance of said variable condenser, a first peak detector, and means for applying an output of said first charge converter to said first peak detector to cause said first peak detector to generate a DC voltage representative of said capacitance of said variable condenser;

and

said second rectifying circuit comprises a second charge converter having an input circuit connected to said reference condenser for generating an AC voltage of an amplitude representative of said capacitance of said reference condenser, a second peak detector, and means for applying an output of said second charge converter to said second peak detector to cause said second peak detector to generate a DC voltage representative of said capacitance of said reference condenser.

10. A capacitive type converter device comprising

a variable condenser having a capacitance which varies in response to a force to be measured;

a reference condenser having a capacitance which is fixed independent of said force to be measured;

an oscillator for applying an oscillation output to said variable condenser and to said reference condenser;

a first rectifying circuit including rectifying diodes for detecting an alternating current flowing through said variable condenser in the form of a DC signal;

a second rectifying circuit including rectifying diodes for detecting an alternating current flowing through said reference condenser in the form of a DC signal;

a circuit for computing the difference between said outputs of said first rectifying circuit and said second rectifying circuit, and for providing an output representing said difference;

a temperature compensation circuit including a temperature sensor for generating a temperature compensation signal representative of the difference between an ambient temperature and a reference temperature; and

control means for controlling said oscillation output of said oscillator to maintain unchanged the sum of said output of said first rectifying circuit and said output of said temperature compensation circuit.