Hyperfrequency energy plasma torch

• US 4,645,973 A
• Filed: 10/02/1984
• Issued: 02/24/1987
• Est. Priority Date: 10/03/1983
• Status: Expired due to Term

• Current Assignee: L'Air Liquide Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Georges Claude (L'Air Liquide SA)
• Original Assignee: L'Air Liquide Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Georges Claude (L'Air Liquide SA)
• Inventors: Bossard, Jean-Paul, Salinier, Guy
• Primary Examiner(s): Moore, David K.
• Assistant Examiner(s): RAZAVI, MICHAEL
• Application Number:
  US06/656,909
• Time in Patent Office: 875 Days
• Field of Search: 315/39, 315/111.31, 315/40, 315/41, 315/111.21, 315/111.01
• US Class Current: 315/39
• CPC Class Codes: H05H 1/30 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/28 takes precedence

Abstract

The hyperfrequency energy is conveyed through a waveguide (1) having a rectangular section. A central plasmagenic gas and an annular sheathing gas are supplied through a T-shaped transverse pipe (2). The upper branches of the T extend in a sealed manner through the small sides of the waveguide. The stem of the T extends with clearance through an opening (7) formed in a large side of the waveguide and is provided with a nozzle (22) which is surrounded by a sleeve (3) terminating in a rolled-over flange (25). Application in the treatment of surfaces and the production of chemical reactions.

Claims

1. A microwave plasma torch for creating a plasma jet, comprising:

a waveguide for connection to a microwave generator, said waveguide having lateral walls and defining an opening in a first said wall and a lateral orifice in a second said wall adjacent said first wall;

a gas supply conduit in the waveguide, the gas supply conduit having a generally T-shape defining a stem, a first upper branch and a second upper branch;

said stem of said supply conduit constituting a downstream part of said supply conduit which extends through said opening with clearance and has an open outlet end and is connected to a discharge nozzle, said first upper branch extending on a first side of said stem, through said lateral orifice without clearance and being adapted to be connected to a source of said gas, and said second upper branch being in alignment with said first branch, on a second side of said stem opposite to said first side, and extending to an end portion adjacent a third said lateral wall of said waveguide which is opposed to said second wall; and

means closing said end portion of said second upper branch.

2. A plasma torch according to claim 1, wherein said waveguide has a rectangular section and said stem and upper branches are rectilinear and perpendicular to the respective walls of the waveguide.

3. A plasma torch according to claim 2, wherein said first wall forms a large side of said waveguide.

4. A plasma torch according to claim 1, further comprising a central conduit disposed in said stem of said gas supply conduit and a second gas supply conduit connected to said central conduit.

5. A plasma torch according to claim 4, wherein said second gas supply conduit is disposed coaxially in one of said upper branches and an elbow connects said second gas supply conduit to said central conduit.

6. A plasma torch according to claim 5, wherein said second gas supply conduit is disposed coaxially with respect to said second upper branch and extends through said third wall.

7. A plasma torch according to claim 4, wherein said nozzle has an exterior cap of a dielectric material.

8. A plasma torch according to claim 1, wherein said stem of said gas supply conduit is surrounded by a sleeve having an inside diameter which is substantially equal to a diameter of said opening, said sleeve being fixed to said waveguide around said opening.

9. A plasma torch according to claim 8, comprising an outer rolled-over flange on a downstream end of said sleeve.

10. A plasma torch according to claim 8, comprising an outer bead having a rounded contour on a downstream end of said sleeve.

11. A plasma torch according to claim 6, wherein said second gas supply conduit extends through said closing means.