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Multi-coordinate measuring machine

  • US 4,647,206 A
  • Filed: 09/18/1984
  • Issued: 03/03/1987
  • Est. Priority Date: 09/23/1983
  • Status: Expired due to Term
First Claim
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1. A multi-coordinate measuring machine with interferometric detection of the path of displacement in each of a plurality of measurement axes, characterized by the fact that for each of the plural measurement axes a complete interferometer head is carried by said machine and is dedicated solely to measurement along its one of the plural axes;

  • said interferometer head in each case comprising a first beam splitter with two outlet beams produced after interference at the beam-splitting layer of said first beam splitter, a separate polarizing beam splitter disposed at each of said outlets to split each of said outlet beams into its two linearly polarized components, a separate photoelectric detector carried with said interfereometer head at each of the two outlets of each of said polarizing beam splitters, whereby to enable electric-signal data for counting of interference lines; and

    a polarized beam supply comprising a single fixedly mounted laser generator, and a separate flexible light guide coupling the output of said laser generator to each said interferometer head, each said light guide being a monomode fiber of polarization-maintaining type.

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