Visible/infrared imaging device with stacked cell structure

• US 4,651,001 A
• Filed: 12/13/1984
• Issued: 03/17/1987
• Est. Priority Date: 12/19/1983
• Status: Expired due to Term

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Yoshida, Okio, Harada, Nozomu
• Primary Examiner(s): Fields, Carolyn E.
• Application Number:
  US06/681,188
• Time in Patent Office: 824 Days
• Field of Search: 250/370 E, 250/370 G, 250/370 K, 250/370 L, 250/338 SE, 250/390, 250/339, 250/332, 250/349, 250/330, 250/352, 357/24 LR, 357/30, 357/32, 357/15, 357/83
• US Class Current: 250/330
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/73265 Layer and wire connectors
• CPC Class Codes: H01L 27/14618 Containers
• CPC Class Codes: H01L 27/14812 Special geometry or disposition of pixel-elements, address lines or gate-electrodes
• CPC Class Codes: H01L 27/14843 Interline transfer
• CPC Class Codes: H01L 27/14868 CCD or CID colour imagers
• CPC Class Codes: H01L 27/14875 Infrared CCD or CID imagers
• CPC Class Codes: H01L 27/14893 comprising a photoconductive layer deposited on the CCD structure
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Abstract

A solid-state image sensing device such as an IT-CCD has first and second photosensing sections which are stacked so that they separately sense visible and infrared image light components contained in input light. The visible image light component contained in image light irradiated through a transparent layer is absorbed by a silicon amorphous layer, thereby sensing a visible image. The remaining light component is transmitted through an insulative layer, and is irradiated into an n⁺ diffusion layer which consists of a Schottky diode and serves as the second photosensing section. The infrared image light component is absorbed in the Schottky diode, thereby sensing the infrared light image.

Claims

1. A solid-state image sensing device comprising:

a semiconductive substrate having a cell region;

a first photosensing section, which is formed on said substrate and within the cell region thereof, said second section comprising means for generating a first charge packet or signal charge by sensing an infrared image light component contained in input light;

a second photosensing section, which is stacked over said first photosensing section to be included in the cell region of said substrate, said second section comprising means for generating a second charge packet or signal charge by sensing a visible image light component which is contained in the input light; and

readout means connected to said first and second photosensing sections, for reading out the first and second signal charges, said readout means comprising,

a transfer channel layer which is formed in said substrate, said transfer channel layer comprising means to transfer the first and second signal charges, and

a gate electrode layer which is formed over said transfer channel section and partially overlap with said first and second photosensing sections, said gate electrode layer comprising means for receiving a pulse signal and for shifting the first and second signal charges into said transfer channel section in response to the pulse signal.

2. The device according to claim 1, wherein said gate electrode layer is so formed as to be included in the cell region of said substrate and serves as a common gate electrode of said first and second photosensing sections.

3. The device according to claim 2, wherein said first photosensing section includes a Schottky type photodiode having a Schottky junction construction which is formed on said semiconductor substrate.

4. The device according to claim 3, wherein said second photosensing section includes a photoconductive layer, said photoconductive layer comprising means for receiving the visible image light component contained in the input light and for generating corresponding signal charges, said photoconductive layer being formed of an amorphous semiconductor material, and extending above said Schottky type photodiode so as to be electrically insulated from said Schottky type photodiode.

5. The device according to claim 4, further comprising:

an insulative layer, which is formed on said Schottky type photodiode formed on said semiconductor substrate for electrically insulating said photoconductive layer from said Schottky type photodiode.

6. The device according to claim 5, further comprising:

a semiconductor diffusion layer which is formed to be adjacent to said Schottky type photodiode formed on said semiconductor substrate and to constitute an electric charge accumulation diode.

7. The device according to claim 6, wherein said insulative layer has an opening positioned on said diffusion layer;

and said second photosensing section further includes a pixel electrode which is formed on said insulative layer and is brought into electrical contact with said semiconductor diffusion layer through said opening formed in said insulative layer, said pixel electrode causing the signal charges from said second photosensing section to be read out through said semiconductor diffusion layer.

8. The device according to claim 7, further comprising:

optical filter means, which is formed between said first and second photosensing sections, for filtering a remaining image light component, so as to transfer only the infrared image light component contained in the remaining image light component to said Schottky type photodiode, when the remaining image light component other than the visible image light component which is contained in the input light and is absorbed by said photoconductive layer of said second photosensing section is transmitted through said second photosensing section and irradiated onto said first photosensing section.

9. The device according to claim 2, further comprising:

optical filter means, which is formed between said first and second photosensing sections, for filtering a remaining image light component so as to transfer only the infrared image light component contained in the remaining image light component to said first photosensing section, when the remaining image light component other than the visible image light component which is contained in the input light and is absorbed by said second photosensing section is transmitted through said second photosensing section and irradiated onto said first photosensing section.

10. A solid-state image sensing device comprising:

a semiconductive substrate having a cell region;

a first photosensing section, which is formed on said substrate and within the cell region thereof, said first section comprising means for generating a first charge packet or signal charge by sensing infrared image light component contained in input light;

a second photosensing section, which is formed over said first photosensing section to be included in the cell region of said substrate, said second section comprising means for generating a second charge packet or signal charge by sensing visible image light component which is contained in the input light; and

a transparent plate which is formed between said first and second photosensing sections and has a thickness corresponding to a focal shift between the visible and infrared images wherein the thickness of said transparent plate is so determined as to

cause the visible and infrared image light components contained in the input light to be focused on said first and second photosensing sections, respectively, and

to obtain a desired temperature gradient formed between said first and second photosensing sections.

11. The device according to claim 10, further comprising:

cooling means for cooling said first photosensing section to a temperature lower than an ambient temperature of said second photosensing section.

12. The device according to claim 11, wherein said cooling means comprises:

a housing for defining, together with said transparent plate, a closed space in which cooling liquid is sealed.

13. The device according to claim 10, further comprising:

cooler means for cooling said first photosensing section for sensing the infrared image light component and for stably keeping said first photosensing section at a predetermined first temperature, so as to minimize the generation of a dark current in an infrared image sensing mode of said first photosensing section.

14. The device according to claim 13, wherein said cooler means forms a temperature gradient between said first and second photosensing sections, and stably maintains a temperature of said second photosensing section at a second temperature higher than the first temperature, so as to minimize the degradation of image quality in a visible image sensing mode of said second photosensing section at the first temperature, and widen a dynamic range.

15. The device according to claim 14, wherein said cooler means comprises means for defining a space in which liquid nitrogen is sealed.