Semiconductor device

• US 4,651,564 A
• Filed: 04/29/1986
• Issued: 03/24/1987
• Est. Priority Date: 09/30/1982
• Status: Expired due to Term

• Current Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Original Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Inventors: Higashi, Robert E., Johnson, Robert G.
• Primary Examiner(s): Goldstein, Herbert
• Application Number:
  US06/858,832
• Time in Patent Office: 329 Days
• Field of Search: 73/204, 338/292, 338/293, 338/308, 338/309, 338/318, 338/319, 357/55
• US Class Current: 73/204.26
• CPC Class Codes: G01F 1/6845 Micromachined devices

Abstract

A flow sensor comprising a pair of thin film heat sensors and a thin film heater is disclosed. A base supports the sensors and heater out of contact with the base with the sensors disposed on opposite sides of the heater. Also disclosed is a semiconductor device comprising a thin film member which comprises an electrical element. The device further comprises a semiconductor body supporting the thin film member out of contact with the body and apparatus for electrically pulsing the electrical element. Such devices are the basis for many types of apparatus, including flow sensors.

Claims

1. A flow sensor, comprising:

a thin film heater;

a pair of thin film sensors;

a semiconductor body with a depression therein, the semiconductor body comprising (100) silicon having a (100) plane and a <

110>

direction;

the heater and sensors lying in a plane substantially parallel to the (100) plane; and

thin film means connecting the heater and the sensors to the body and bridging the depression so that at least a major portion of the heater and the sensors are out of contact with the body and with the sensors disposed on opposite sides of the heater, the means connecting the heater and the sensors to the body having a configuration oriented at a non-zero angle to the <

110>

direction.

2. The apparatus of claim 1 wherein the non-zero angle is substantially 45 degrees.

3. The apparatus of claim 2 wherein the thin film heater and sensors each comprise a permalloy element.

4. The apparatus of claim 3 wherein each permalloy element has a resistance in the range of approximately 200 ohms to approximately 2000 ohms at approximately 25 degrees Centigrade.

5. The apparatus of claim 4 wherein the means connecting the heater and the sensors to the body comprises a dielectric encapsulating the heater and the sensors.

6. The apparatus of claim 5 wherein the dielectric has a thickness in the range of approximately 0.8 micron to approximately 1.2 microns.

7. The apparatus of claim 6 wherein the dielectric comprises silicon nitride.

8. The apparatus of claim 1 wherein the thin film heater and sensors each comprise a permalloy element.

9. The apparatus of claim 8 wherein each permalloy element has a resistance in the range of approximately 200 ohms to approximately 2000 ohms at approximately 25 degrees Centigrade.

10. The apparatus of claim 9 wherein the means connecting the heater and the sensors to the body comprises a dielectric encapsulating the heater and the sensors.

11. The apparatus of claim 10 wherein the dielectric has a thickness in the range of approximately 0.8 micron to approximately 1.2 microns.

12. The apparatus of claim 11 wherein the dielectric comprises silicon nitride.

13. The apparatus of claim 1 wherein the means connecting the heater and the sensors to the body comprises a dielectric encapsulating the heater and the sensors.

14. The apparatus of claim 13 wherein the dielectric has a thickness in the range of approximately 0.8 micron to approximately 1.2 microns.

15. The apparatus of claim 14 wherein the dielectric comprises silicon nitride.

16. The apparatus of claim 1 wherein the thin film means connecting the heater and the sensors comprises an aperture separating each sensor from the heater.

17. A flow sensor, comprising:

a thin film heater encapsulated in thin film dielectric;

a pair of thin film sensors encapsulated in thin film dielectric, the sensors being disposed on opposite sides of the heater;

a semiconductor body with a depression therein; and

the encapsulated heater and sensors forming at least one thin film member bridged across the depression and connected thereto through said thin film dielectric so that at least a major portion of the heater and the sensors are out of contact with the semiconductor body, the thin film member bridged across the depression having a length and width, the length of the member being greater than the width of the member, the heater and sensors being substantially thermally isolated from the semiconductor body; and

wherein the semi conductor body comprises (100) silicon having a (100) plane and a <

100>

direction;

the heater and sensors lie in a plane substantially parallel to the (100) plane; and

the dielectric means connecting the heater and sensors to the body have a configuration oriented at a non-zero angle to the <

110>

direction.

18. The apparatus of claim 17 wherein the non-zero angle is substantially 45 degrees.

19. A flow sensor, comprising:

a semiconductor body having a depression formed in to a first surface of the body;

a thin film heater encapsulated in thin film dielectric;

a pair of thin film sensors encapsulated in thin film dielectric, the thin film sensors being disposed on opposite sides of the heater; and

the encapsulated heater and sensors forming at least one thin film member havng first and second substantially opposing ends attached to the first surface so the thin film member is bridged across the depression and connected thereto through said thin film dielectric, the thin film member having a length and width, the length of the member being greater than the width of the member, the heater and the sensors being substantially thermally isolated from the semiconductor body; and

wherein the semiconductor body comprises (100) silicon having a (100) plane and a <

110>

direction;

the heater and sensors lie in a plane substantially parallel to the (100) plane; and

the dielectric means connecting the heater and sensors to the body have a configuration oriented at a non-zero angle to the <

110>

direction.

20. The apparatus of claim 19 wherein the non-zero angle is substantially 45 degrees.