×

Semiconductor device

  • US 4,651,564 A
  • Filed: 04/29/1986
  • Issued: 03/24/1987
  • Est. Priority Date: 09/30/1982
  • Status: Expired due to Term
First Claim
Patent Images

1. A flow sensor, comprising:

  • a thin film heater;

    a pair of thin film sensors;

    a semiconductor body with a depression therein, the semiconductor body comprising (100) silicon having a (100) plane and a <

    110>

    direction;

    the heater and sensors lying in a plane substantially parallel to the (100) plane; and

    thin film means connecting the heater and the sensors to the body and bridging the depression so that at least a major portion of the heater and the sensors are out of contact with the body and with the sensors disposed on opposite sides of the heater, the means connecting the heater and the sensors to the body having a configuration oriented at a non-zero angle to the <

    110>

    direction.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×