Inorganic-polymer-derived dielectric films
First Claim
1. A method of coating a substrate with a thin film of a polymer of predetermined porosity, comprising:
- depositing the thin film on the substrate from a dilute non-gelled solution comprising at least one hydrolyzable metal alkoxide of a polyermic network-forming cation, water, an alochol or other solvent compatible with the hydrolysis and the polymerization of the metal alkoxide, and an acid or a base, wherein the concentration of the alkoxide in said solution is about 1 to 12 equivalent weight %, andprior to the depositing said film, controlling the structure of said polymer for a given composition of said solution exclusive of the acid or base component and the water component,(a) by adjusting each of the water content, the pH, and the temperature to obtain the desired concetration of alkoxide, and then adjusting the time of standing of said solution prior to lowering the temperature of said solution, and(b) lowering the temperature of the solution after said time of standing to about 15 degrees C or lower to trap said solution in a state in which, after said depositing step, a coating of the desired porosity will be obtained, andcuring said deposited film by removing a sufficient quantity of solvent to cause gelation, and heating said film at a temperature compatible with the substrate and effective for crosslinking and densifying said film, whereby there is obtained on the substrate a thin film of a polymer of predetermined porosity and corresponding pore size.
1 Assignment
0 Petitions
Accused Products
Abstract
A method of coating a substrate with a thin film of a polymer of predetermined porosity comprises depositing the thin film on the substrate from a non-gelled solution comprising at least one hydrolyzable metal alkoxide of a polymeric network forming cation, water, an alcohol compatible with the hydrolysis and the polymerization of the metal alkoxide, and an acid or a base, prior to depositing the film, controlling the structure of the polymer for a given composition of the solution exclusive of the acid or base component and the water component, (a) by adjusting each of the water content, the pH, and the temperature to obtain the desired concentration of alkoxide, and then adjusting the time of standing of the solution prior to lowering the temperature of the solution, and (b) lowering the temperature of the solution after the time of standing to about 15 degrees C. or lower to trap the solution in a state in which, after the depositing step, a coating of the desired porosity will be obtained, and curing the deposited film at a temperature effective for curing whereby there is obtained a thin film of a polymer of a predetermined porosity and corresponding pore size on the substrate.
118 Citations
15 Claims
-
1. A method of coating a substrate with a thin film of a polymer of predetermined porosity, comprising:
-
depositing the thin film on the substrate from a dilute non-gelled solution comprising at least one hydrolyzable metal alkoxide of a polyermic network-forming cation, water, an alochol or other solvent compatible with the hydrolysis and the polymerization of the metal alkoxide, and an acid or a base, wherein the concentration of the alkoxide in said solution is about 1 to 12 equivalent weight %, and prior to the depositing said film, controlling the structure of said polymer for a given composition of said solution exclusive of the acid or base component and the water component, (a) by adjusting each of the water content, the pH, and the temperature to obtain the desired concetration of alkoxide, and then adjusting the time of standing of said solution prior to lowering the temperature of said solution, and (b) lowering the temperature of the solution after said time of standing to about 15 degrees C or lower to trap said solution in a state in which, after said depositing step, a coating of the desired porosity will be obtained, and curing said deposited film by removing a sufficient quantity of solvent to cause gelation, and heating said film at a temperature compatible with the substrate and effective for crosslinking and densifying said film, whereby there is obtained on the substrate a thin film of a polymer of predetermined porosity and corresponding pore size. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
Specification