Apparatus for examining samples by electron emission

• US 4,654,556 A
• Filed: 10/12/1983
• Issued: 03/31/1987
• Est. Priority Date: 10/19/1982
• Status: Expired due to Fees

• Current Assignee: COMMISSARIAT A L ENERGIE ATOMOQUE 31/33 RUE DE LA 75015 PARIS FRANCE
• Original Assignee: Commissariat a L'Energie Atomique (AES Corporation)
• Inventors: Comby, Georges
• Primary Examiner(s): DeMeo, Palmer C.
• Assistant Examiner(s): O SHEA, SANDRA L
• Application Number:
  US06/541,130
• Time in Patent Office: 1,266 Days
• Field of Search: 313/93, 313/309, 250/385, 250/306, 250/307, 250/282, 250/285, 250/288, 250/289, 250/441.1, 250/442.1
• US Class Current: 313/93
• CPC Class Codes: G01N 23/227 Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Abstract

The invention relates to the examination of samples which, by thermal or photon excitation, are able to emit electrons. These electrons are detected and located by a counter incorporating a cathode forming a mesh network. Pointed anodes coincide with the axes of the meshes. The enclosure of the apparatus is sealed by the sample and its excitation means. The invention can be used in dosimetry or in the checking of surface states.

Claims

1. An apparatus for the examination of solid sample by stimulated electron emission, which comprises:

an enclosure;

an insulating support located within the enclosure and having at least one face, at least a part of the face being coated with a conductive material to form a network of meshes, the meshes defining a first set of axes and the network of meshes comprising a cathode;

a plurality of anodes located within the enclosure and being insulated from one another and polarized with respect to the cathode, the anodes further being in the form of points, the points defining a second set of axes, the second set of axes coinciding with the first set of axes and the points being set back with respect to the conductive mesh network;

the enclosure defining an opening positioned beyond the anodes with respect to the conductive mesh network, the opening serving to house said sample;

a closure member which comprises said sample which closes said enclosure and with sealing means interacting with said enclosure to form a tight seal;

filling means for filling the enclosure with a multiplying gaseous medium; and

excitation means to apply an excitation to the sample.

2. An apparatus according to claim 1, wherein the sample excitation means are thermal excitation means.

3. An apparatus according to claim 1, wherein the sample excitation means are photon excitation means.

4. An apparatus according to one of the claims 1 to 3, wherein means are provided for filling the tight interior of the enclosure with multiplier gas under atmospheric pressure.

5. An apparatus according to claim 4, wherein the multiplier gas is methane.

6. An apparatus according to claim 1, further comprising means for carrying out and checking the relative displacements of the apparatus with respect to the sample.

7. An apparatus according to claim 3, wherein the photon excitation means are constituted by a tight source integral with the enclosure and supplying a beam of light located through an opening in the enclosure and a corresponding opening of the insulating support.

8. An apparatus according to claim 7, wherein the cathode and the anodes are arranged symmetrically around the light beam axis.

9. An apparatus as set forth in claim 1, wherein said closure member is comprised of the sample.

10. An apparatus as set forth in claim 2, wherein the sample engages the thermal excitation means and the closure member is comprised of the sample and the thermal excitation means.