Spatial light modulator having a capacitively coupled photoconductor
First Claim
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1. A spatial light modulator comprising:
- a semiconductor element comprising a semiconductor substrate having a first surface and an opposed second surface, a first transparent metallic electrode, a dielectric layer disposed between said first surface of said semiconductor substrate and a surface of said first transparent metallic electrode, and a charge-confining microgroove lattice structure formed in said second surface of said semiconductor substrate;
a dielectric mirror having a first surface and an opposed second surface, said first surface of said dielectric mirror being adjacent said second surface of said semiconductor substrate;
an electro-optic crystal having a first surface and an opposed second surface, said first surface of said electro-optic crystal being adjacent said second surface of said dielectric mirror;
a second transparent electrode having a first surface and an opposed second surface, said first surface of said second transparent electrode being adjacent said second surface of said electro-optic crystal; and
means for applying a voltage pulse between said first transparent electrode and said second transparent electrode.
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Abstract
A spatial light modulator in which the photoreceptor is a capacitively coupled semiconductor in the form of a silicon-silicon dioxide-transparent electrode structure.
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Citations
7 Claims
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1. A spatial light modulator comprising:
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a semiconductor element comprising a semiconductor substrate having a first surface and an opposed second surface, a first transparent metallic electrode, a dielectric layer disposed between said first surface of said semiconductor substrate and a surface of said first transparent metallic electrode, and a charge-confining microgroove lattice structure formed in said second surface of said semiconductor substrate; a dielectric mirror having a first surface and an opposed second surface, said first surface of said dielectric mirror being adjacent said second surface of said semiconductor substrate; an electro-optic crystal having a first surface and an opposed second surface, said first surface of said electro-optic crystal being adjacent said second surface of said dielectric mirror; a second transparent electrode having a first surface and an opposed second surface, said first surface of said second transparent electrode being adjacent said second surface of said electro-optic crystal; and means for applying a voltage pulse between said first transparent electrode and said second transparent electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification