Method for producing a plurality of plate shaped microstructured metal bodies

• US 4,661,212 A
• Filed: 09/03/1986
• Issued: 04/28/1987
• Est. Priority Date: 10/22/1985
• Status: Expired due to Term

• Current Assignee: Kernforschungszentrum Karlsruhe GmbH
• Original Assignee: Karlsruher Institut Fur Technologie
• Inventors: Hagmann, Peter, Maner, Asim, Becker, Erwin, Ehrfeld, Wolfgang, Munchmeyer, Dietrich
• Primary Examiner(s): Tufariello, T. M.
• Application Number:
  US06/903,304
• Time in Patent Office: 237 Days
• Field of Search: 204/4, 204/11
• US Class Current: 205/75
• CPC Class Codes: B81C 2201/0128 Processes for removing material
• CPC Class Codes: B81C 2201/032 LIGA process
• CPC Class Codes: B81C 2201/034 Moulding
• CPC Class Codes: B81C 99/008 separating the processed structure from a mother substrate
• CPC Class Codes: C25D 1/10 Moulds; Masks; Masterforms

Abstract

In order to produce a plurality of plate shaped metal bodies containing a microstructure from a single molding tool constituting a master for the bodies, a negative mold is formed by filling the recesses in the microstructure of the tool with electrically insulating material and fastening to the insulating material an electrically conductive material which contacts the end faces of the microstructure of the tool.

Claims

1. In a method for producing a plurality of plate shaped metal bodies containing a microstructure from a single molding tool containing the microstructure and having a front surface from which the microstructure extends, which method includes producing a negative mold of the tool, the negative mold being of electrically insulating material and having a portion which conforms to the front surface of the tool, electrolytically filling the negative mold with a mass of metal which constitutes such a metal body, and removing the negative mold from the resulting metal body, the improvement wherein:

said method comprises a preliminary step of releasably disposing a layer of electrically conductive material on the front surface of the tool; and

said step of producing a negative mold includes transferring the layer of electrically conductive material from the tool to the portion of the negative mold which conforms to the front surface of the tool.

2. A method as defined in claim 1 wherein said step of releasably disposing a layer comprises:

initially disposing a thin, uniform layer of the electrically conductive material on an intermediate substrate, and bringing the front surface of the tool into contact with the uniform layer for transferring electrically conductive material from the uniform layer to the front surface.

3. In a method for producing a plurality of plate shaped metal bodies containing a microstructure from a single molding tool containing the microstructure, the microstructure having at least one recess and the tool having a front surface to which the microstructure and the at least one recess exend, which method includes producing a negative mold of the tool, the negative mold being composed at least in part of electrically insulating material, electrolytically filling the negative mold with a mass of metal which constitutes such a metal body, and removing the negative mold from the resulting metal body, the improvement wherein:

said step of producing a negative mold comprises forming the negative mold to have a first portion of electrically insulating material which fills all recesses in the tool and extends not beyond the front surface of the tool and a second portion which is electrically conductive, covers, and conforms to, the front surface of the tool, and is joined to the first portion.

4. A method as defined in claim 3 wherein said step of producing a negative mold comprises:

forming the first portion by filling all recesses of the microstructure contained by the tool with electrically insulating material, and forming the second portion by disposing a layer of an electrically conductive molding mass upon the front surface of the tool so that the molding mass contacts the front surface and is joined to the electrically insulating material.

5. A method as defined in claim 3 wherein said step of producing a negative mold comprises:

providing a first layer of a deformably electrically conductive molding material;

attaching to the first layer a second layer of deformable electrically insulating molding material; and

pressing the molding tool into the second layer, with the front surface of the tool directed toward the second layer, until the front surface of the molding tool contacts the first layer.

6. A method as defined in claim 3 wherein the microstructure contained by the tool includes recesses which extend to the front surface of the tool, and said step of producing a negative mold comprises:

providing a molding mass of deformable, electrically insulating material containing solid, electrically conductive particles having dimensions which are selected to render the particles incapable of entering the recesses; and

pressing the tool into the molding mass sufficiently to fill the recesses and cover the front face of the tool with the electrically insulating material so as to form the negative mold, whereby the first portion of the negative mold consists of electrically insulating material and the second portion of the mold is composed of electrically insulating material filled with the conductive particles.