Process and apparatus for continuous production of lightweight arrays of photovoltaic cells

• US 4,663,828 A
• Filed: 10/11/1985
• Issued: 05/12/1987
• Est. Priority Date: 10/11/1985
• Status: Expired due to Term

• Current Assignee: United Solar Systems Corp.
• Original Assignee: Energy Conversion Devices
• Inventors: Hanak, Joseph J.
• Primary Examiner(s): Weisstuch, Aaron
• Application Number:
  US06/786,782
• Time in Patent Office: 578 Days
• Field of Search: 29/572, 29/589, 29/590, 136/258 PC, 136/258 AM, 204/298, 156/345, 156/643, 427/39, 427/74, 427/86, 427/87, 427/255.5, 427/295, 118/718, 118/719, 118/723, 118/724, 118/729
• US Class Current: 438/62
• CPC Class Codes: H01L 31/03921 including only elements of Group IV of the Periodic Table
• CPC Class Codes: H01L 31/1896 for thin-film semiconductors
• CPC Class Codes: H01L 31/206 Particular processes or apparatus for continuous treatment of the devices, e.g. roll-to roll processes, multi-chamber deposition
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

A process and apparatus for contiuously producing a relatively large-area, lightweight array of thin film semiconductor alloy photovoltaic cells having no substrate includes depositing a semiconductor alloy film, such as amorphous silicon, on a traveling surrogate substrate, applying a support material to the traveling film to give it mechanical strength and separating the film and support material from the traveling surrogate substrate. The surrogate substrate is preferably an endless stainless steel band from which the deposited alloy film is repeatedly stripped and on which deposits are repeatedly made. The apparatus may provide for the deposition and patterning of a back electrode on the substrate before deposition of the alloy film to form one set of electrical interconnections for the array. The apparatus may also provide for the deposition and patterning of a transparent, electrically conducting layer on the alloy film, before application of the support material, in order to form a second set of electrical interconnections for the array. The apparatus may also apply a protective, support material to the rear of the alloy film.

Claims

1. A process for producing relatively large-area, lightweight arrays of thin film semiconductor alloy photovoltaic cells comprising:

continuously depositing a thin semiconductor alloy film on a traveling surrogate substrate;

continuously applying a transparent support material to said deposited thin film semiconductor alloy film opposite said traveling surrogate substrate; and

continuously separating said alloy film and support material from said surrogate substrate.

2. The process of claim 1 including thermally bonding said support material to said alloy film.

3. The process of claim 1 wherein said surrogate substrate is endless.

4. The process of claim 1 including depositing said alloy film continuously by establishing and maintaining a glow discharge in at least one gaseous mixture containing at least one semiconductor precursor gas.

5. The process of claim 4 including depositing said thin film alloy in a plurality of layers by establishing and maintaining a plurality of glow discharges in a plurality of gaseous mixtures, each gas mixture containing at least one semiconductor precursor gas for depositing a thin film semiconductor alloy layer and some of said gas mixtures containing a dopant precursor gas for depositing a doped thin film semiconductor alloy layer.

6. The process of claim 5 including depositing, in sequence, a layer of said alloy film of a first conductivity type, a layer of substantially intrinsic conductivity type, and a layer of a second conductivity type opposite from that of said first conductivity type.

7. The process of claim 6 wherein said at least one semiconductor precursor gas is chosen from the group consisting essentially of:

silane;

disilane;

germane;

silicon tetrafluoride;

germanium tetrafluoride and mixtures thereof.

8. The process of claim 1 wherein said surrogate substrate comprises stainless steel.

9. The process of claim 1 wherein said alloy film is separated from said surrogate substance by flexing said substrate.

10. The process of claim 9 including passing said substrate at least partially around a roller.

11. The process of claim 1 wherein said alloy film and said substrate have different thermal coefficients of expansion and are separated from each other by exposing at least one of them to a thermal shock.

12. The process of claim 11 including continuously passing said deposited alloy film and said traveling substrate over a roller and continuously cooling said roller to create said thermal shock.

13. The process of claim 11 including continuously passing said deposited alloy film and said traveling substrate over a roller and continuously heating said roller to create said thermal shock.

14. The process of claim 11 including heating said traveling surrogate substrate to create said thermal shock.

15. The process of claim 1 including continuously forming said alloy film on said traveling surrogate substrate into a preselected pattern of individual photovoltaic cells before applying said support material.

16. The process of claim 1 including continuously depositing a transparent, electrically conducting layer on said alloy film before applying said support material.

17. The process of claim 16 wherein said transparent, electrically conducting layer is selected from the group consisting essentially of indium tin oxide, tin oxide, and cadmium tin oxide.

18. The process of claim 16 including continuously forming said transparent, electrically conducting layer into a preselected pattern of electrical conductors before applying said support material.

19. The process of claim 1 including forming said alloy film into individual photovoltaic cells after separating said alloy film and support material from said traveling surrogate substrate.

20. The process of claim 1 including applying electrical contacts to the side of said film opposite said support material.

21. The process of claim 1 including continuously depositing an electrically conducting layer on said traveling surrogate substrate before depositing said alloy film and removing said electrically conducting layer with said alloy film and support layer from said surrogate substrate.

22. The process of claim 21 including continuously forming said electrically conducting layer into patterns of electrical conductors after separating said film from said traveling surrogate substrate.

23. Apparatus for producing relatively large-area, lightweight arrays of thin film semiconductor alloy photovoltaic cells comprising:

means for continuously depositing a thin film of semiconductor alloy material on a surrogate substrate traveling through said apparatus;

means for continuously applying a transparent support material to said deposited thin film alloy opposite said traveling surrogate substrate; and

means for continuously separating said thin film alloy and support material from said surrogate support.

24. The apparatus of claim 23 wherein said traveling surrogate substrate is an endless band and including means for driving said endless band.

25. The apparatus of claim 23 wherein said means for continuously depositing a thin film alloy comprises at least one glow discharge deposition chamber containing a cathode for establishing a glow discharge plasma between said cathode and surrogate substrate in a gas mixture admitted to said chamber and containing at least one semiconductor precursor gas.

26. The apparatus of claim 25 including at least three glow discharge deposition chambers disposed sequentially, said first and third chambers being dedicated to depositing opposite conductivity type layers of a thin film semiconductor alloy, said second chamber being dedicated to depositing a substantially intrinsic layer of a thin film semiconductor alloy.

27. The apparatus of claim 23 including means for flexing said surrogate substrate to separate said alloy film from said substrate.

28. The apparatus of claim 27 wherein said means for flexing includes a roller around which said substrate may at least partially pass.

29. The apparatus of claim 23 including means for continuously applying a thermal shock to at least one of said alloy film and said substrate to separate them.

30. The apparatus of claim 29 wherein said means for applying a thermal shock comprises a roller disposed to engage said traveling substrate for receiving a liquid for maintaining the temperature of said roller substantially different from that of said film.

31. The apparatus of claim 29 wherein said means for applying a thermal shock comprises a radiant heater disposed adjacent the path of said traveling surrogate substrate.

32. The apparatus of claim 23 including means for continuously forming said alloy film into individual photovoltaic cells before said support material is applied to said alloy film.

33. The apparatus of claim 32 wherein said means for forming said alloy film comprises a laser scriber.

34. The apparatus of claim 23 including means for continuously depositing a back electrode on said surrogate substrate before depositing said alloy film on said substrate.

35. The apparatus of claim 34 wherein said means for depositing a back electrode includes sputtering means for depositing an electrically conducting back electrode.

36. The apparatus of claim 34 including means for continuously forming said back electrode into a preselected pattern by removing portions of said deposited back electrode.

37. The apparatus of claim 36 wherein said means for forming said back electrode comprises a laser scriber.

38. The apparatus of claim 23 including means for continuously depositing a transparent, electrically conductive layer on said alloy film before said support material is applied to said alloy film.

39. The apparatus of claim 38 wherein said means for depositing a transparent, electrically conductive layer includes sputtering means for depositing a transparent conductive oxide.

40. The apparatus of claim 28 including means for continuously forming said transparent, electrically conductive layer into a preselected pattern by removing portions of said deposited transparent, electrically conductive layer.

41. The apparatus of claim 40 wherein said means for forming said transparent, electrically conductive layer into a preselected pattern comprises a laser scriber.

42. The apparatus of claim 23 including means for continuously applying a protective film to said alloy film on the side opposite from said support material.