Accelerometer sensor with flat pendular structure
First Claim
1. An accelerometer sensor comprising a flat pendular structure made from one and the same crystalline wafer, said structure having in a same plane, a flat fixed part, two parallel blades flexible in the said plane and delimiting therebetween a space, each of said blades having a first end portion fixedly connected to said fixed part, and a second end portion, said structure further comprising a flat test body connected to the second end portions of said blades so as to be suspended from the fixed part and to be able to move in translation in the same plane along a sensitive axis, ssid flat test body extending at least partially into said space, wherein said first end portions of the blades are located at a predetermined level and said test body extends in a zone located below said level, opposite to said second end portions of the blades.
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Abstract
An accelerometer sensor comprising a flat pendular structure having a fixed part and a flat test body suspended from the fixed part by two parallel blades flexible in the plane of said test body, so as to be able to move in translation along a sensitive axis. Said test body extends at least partially into the space between said two flexible blades.
38 Citations
18 Claims
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1. An accelerometer sensor comprising a flat pendular structure made from one and the same crystalline wafer, said structure having in a same plane, a flat fixed part, two parallel blades flexible in the said plane and delimiting therebetween a space, each of said blades having a first end portion fixedly connected to said fixed part, and a second end portion, said structure further comprising a flat test body connected to the second end portions of said blades so as to be suspended from the fixed part and to be able to move in translation in the same plane along a sensitive axis, ssid flat test body extending at least partially into said space, wherein said first end portions of the blades are located at a predetermined level and said test body extends in a zone located below said level, opposite to said second end portions of the blades.
- 2. An accelerometer sensor comprising a flat pendular structure made from one and the same crystalline wafer, said structure having in a same plane, a flat fixed part, two parallel blades flexible in the said plane and delimiting therebetween a space, each of said blades having a first end portion fixedly connected to said fixed part, and a second end portion, said structure further comprising a flat test body connected to the second end portions of said blades so as to be suspended from the fixed part and to be able to move in translation in the said plane along a sensitive axis, said flat test body extending at least partially into said space, wherein electric connections between the test body and the fixed part of the pendular structure are formed by metallizations formed on the thin faces of said flexible blades.
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14. An accelerometer sensor comprising a flat pendular structure made from one and the same crystalline wafer, said structure having in a same plate, a flat fixed part, two parallel blades flexible in the said plane and delimiting therebetween a space, each of said blades having a first end portion fixedly connected to said fixed part, and a second end portion, said structure further comprising a flat test body connected to the second end portions of said blades so as to be suspended from the fixed part and to be able to move in translation in the said plane along a sensitive axis, said flat test body extending at least partially into said space, wherein said flat fixed part comprises at least a first edge zone which carries a first metallization and said flat test body comprises at least a second edge zone which carries a second metallization facing the first metallization, said first and second metallizations forming a capacitor whose capacity varies depending on the position of said test body, electric connections between said second metallization and the fixed part of the pendular structure being formed by metallizations provided on the thin faces of said flexible blades.
- 15. An accelerometer sensor comprising a flat pendular structure made from one and the same crystalline wafer, said structure having in a same plane, a flat fixed part, two parallel blades flexible in the said plane and delimiting therebetween a space, each of said blades having a first end portion fixedly connected to said fixed part, and a second end portion, said structure further comprising a flat test body connected to the second end portions of said blades so as to be suspended from the fixed part and to be able to move in translation in the said plane along a sensitive axis, said flat test body extending at least partially into said space, wherein the test body comprises at least one lateral extension extending above said second end portions of the blades, said lateral extension comprising at least one rectilinear metallized edge perpendicular to the sensitive axis of the pendular structure and the fixed part of said pendular structure comprising at least one metallized rectilinear edge parallel to the metallized edge of said test body and forming therewith a flat capacitor whose capacity varies depending on the position of said test body.
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17. An accelorometer sensor comprising a flat pendular structure made from one and the same crystalline wafer, said structure having in a same plane, a flat fixed part, two parallel blades flexible in the said plane and delimiting therebetween a space, each of said blades having a first end portion fixedly connected to said fixed part, and a second end portion, said structure further comprising a flat test body connected to the second end portions of said blades so as to be suspended from the fixed part and to the able to move in translation in the said plane along a sensitive axis, said flat test body extending at least partially into said space, wherein said test body comprises first and second lateral edges, the first at least of these lateral edges bearing a first metallization and said fixed part of said pendular structure comprises at least one wing which extends between said first lateral edge and a corresponding flexible blade, said wing having an edge facing said first lateral edge and bearing a second metallization, said first and second metallizations forming therewith a flat capacitor whose capacity varies depending on the position of said test body.
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18. An accelerometer sensor comprising a flat pendular structure made from one and the same crystalline wafer, said structure having in a same plane, a flat fixed part, two parallel blades flexible in the said plane and delimiting therebetween a space, each of said blades having a first end portion fixedly connected to said fixed part, and a second end portion, said structure further comprising a flat test body connected to the second end portions of said blades so as to be suspended from the fixed part and to be able to move in translation in the said plane along a sensitive axis, said flat test body extending at least partially into said space, wherein said test body comprises a first inner longitudinal edge which presents a crenelated shape having first square projections separated from each other by first square notches, and the fixed part of the pendular structure presents a crenelated shape having second square projections separated from each other by second square notches, said first square projections engaging in said second square notches and said second square projections engaging in said first square notches, said first square projections having first and second lateral edge portions bearing metallizations and said second square projections having third and fourth lateral edge portions bearing metallizations, the metallizations of said first lateral edge portions forming with the metallizations of said fourth lateral edge portions a first plurality of capacitors and the metallizations of said second lateral edge portions forming with the metallizations of said third lateral portions a second plurality of capacitors.
Specification