Barium and/or strontium aluminosilicate crystal-containing glasses for flat panel display devices
First Claim
1. In a flat panel display device containing a flat, transparent substrate for growing large crystal polysilicon semiconductor films thereon, the improvement wherein said substrate is a phase separated glass consisting essentially of extremely fine-grained crystals homogeneously dispersed in a glass matrix, said phase separated glass being essentially free from alkali metal oxide, exhibiting an annealing point higher than 900°
- C., a linear coefficient of thermal expansion over the temperature range of 25°
-300°
C. between about 30-40×
10-7 /°
C., and consisting essentially, expressed in terms of mole percent on the oxide basis, of about
space="preserve" listing-type="tabular">______________________________________ SiO.sub.2 68-80 Al.sub.2 O.sub.3 18-26 BaO and/or SrO 2-6. ______________________________________
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Abstract
This invention is directed to the fabrication of flat panel display devices wherein a film of large crystal polysilicon is grown on a substrate. More specifically, this invention is drawn to the fabrication of such devices wherein the substrate is fashioned from a phase separated glass consisting essentially of extremely fine-grained crystals homogeneously dispersed in a glass matrix, the base glass therefor being essentially free from alkali metal oxide and consisting essentially, in mole percent, of 2-6% BaO and/or SrO, 18-26% Al2 O3, and 68-80% SiO2.
22 Citations
1 Claim
-
1. In a flat panel display device containing a flat, transparent substrate for growing large crystal polysilicon semiconductor films thereon, the improvement wherein said substrate is a phase separated glass consisting essentially of extremely fine-grained crystals homogeneously dispersed in a glass matrix, said phase separated glass being essentially free from alkali metal oxide, exhibiting an annealing point higher than 900°
- C., a linear coefficient of thermal expansion over the temperature range of 25°
-300°
C. between about 30-40×
10-7 /°
C., and consisting essentially, expressed in terms of mole percent on the oxide basis, of about
space="preserve" listing-type="tabular">______________________________________ SiO.sub.2 68-80 Al.sub.2 O.sub.3 18-26 BaO and/or SrO 2-6. ______________________________________
- C., a linear coefficient of thermal expansion over the temperature range of 25°
Specification
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- Resources
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Current AssigneeCorning Glass Works Inc. (Corning Incorporated)
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Original AssigneeCorning Glass Works Inc. (Corning Incorporated)
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InventorsDumbaugh, William H. Jr.
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Primary Examiner(s)BELL, MARK LEE
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Application NumberUS06/912,230Time in Patent Office232 DaysField of Search501/32, 501/69, 428/428US Class Current501/32CPC Class CodesC03C 3/085 containing an oxide of a di...
