Image sensor manufacturing method

• US 4,671,853 A
• Filed: 02/12/1986
• Issued: 06/09/1987
• Est. Priority Date: 02/27/1985
• Status: Expired due to Term

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Takayama, Satoshi
• Primary Examiner(s): Powell, William A.
• Application Number:
  US06/828,648
• Time in Patent Office: 482 Days
• Field of Search: 29/572, 29/591, 156/648, 156/656, 156/659.1, 156/662, 156/667, 427/86, 430/5, 430/313, 430/318, 357/17, 357/19, 357/30, 357/71, 136/243, 136/258
• US Class Current: 438/73
• CPC Class Codes: H01L 27/14623 Optical shielding
• CPC Class Codes: H01L 27/14665 Imagers using a photoconductor layer
• CPC Class Codes: H01L 27/14696 The active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe

Abstract

In a method of manufacturing image sensors, an electrode layer of an opaque metal material is formed on a transparent ceramic substrate and is patterned into individual electrodes in photoengraving process. An amorphous semiconductor layer is deposed over the electrodes formed on the substrate and a common electrode is formed on the amorphous semiconductor layer. The amorphous semiconductor layer is exposed with light rays through the substrate so that each portions of the layer which is located above surface regions of the substrate between the electrodes have high electric resistance.

Claims

1. A method of manufacturing image sensors which comprises the steps of:

forming a plurality of isolated electrodes, prepared from an opaque metal material, on one side of a transparent ceramic substrate;

depositing an amorphous semiconductor layer over the plural isolated electrodes mounted on said one side of the transparent ceramic substrate; and

mounting a common electrode on said amorphous semiconductor layer, wherein a plurality of photoelectric converting elements are defined by said common electrode, individual electrodes and the intervening amorphous semiconductor layer, after whose formation light beams are illuminated from the opposite side of said ceramic substrate, causing those portions of said amorphous semiconductor layer which are defined between said photoelectric converting elements to have high electric resistance.

2. The method according to claim 1, wherein the formation of said individual electrodes is carried out by the steps of:

coating said one side of the substrate with a layer prepared from an opaque metal material to provide an electrode layer; and

patterning the electrode layer into individual electrodes by photoengraving.

3. The method according in claim 1, wherein said amorphous silicon layer is deposited by the plasma CVD process or photo CVD process.

4. The method according to claim 1, wherein said amorphous silicon layer is prepared from an amorphous semiconductor material containing at least one semiconductor element selected from Group IV of the periodic table such as Si or Ge, and further at least one amorphous semiconductor element selected from the group consisting of H and F as a dangling bond.

5. The method according to claim 3, wherein said amorphous silicon layer is prepared from amorphous semiconductor material containing at least one selected from the group consisting of a-Si:

H, a-SiC;

H, a-Si;

F and a-Ge;

H.

8. The method according to claim 1, wherein said amorphous silicon layer is deposited by the plasma CVD process or photo CVD process.

9. The method according to claim 1, wherein said amorphous silicon layer is prepared from amorphous semiconductor material which contains at least on semiconductor element such as Si and Ge of Group IV of the periodic table, and, further, at least one element selected from the group consisting of H and F as a dangling bond.

10. The method according to claim 3, wherein said amorphous silicon layer is prepared from an amorphous semiconductor material containing at least one selected from the group consisting of a-Si:

H, a-SiC;

H, a-Si;

F and a-Ge;

H.

6. A method of manufacturing image sensors which comprises the steps of:

forming a common electrode on one side of a transparent ceramic substrate;

depositing an amorphous semiconductor layer on the common electrode mounted on said one side of the transparent ceramic substrate; and

mounting a plurality of isolated electrodes, prepared from an opaque metal material, on said amorphous semiconductor layer,

wherein a plurality of photoelectric converting elements are defined by said common electrode, individual electrodes and amorphous semiconductor region interposed between said common electrode and individual electrodes, and the previously formed amorphous semiconductor layer is exposed with light beams through the ceramic substrate, thereby causing those portions of said amorphous semiconductor layer which are interposed between the adjacent photoelectric converting elements to have a high electric resistance.

7. The method according to claim 6, wherein said individual electrodes are formed by the steps of covering the amorphous semiconductor layer with an electrode layer prepared from an opaque metal material, and patterning said electrode layer into individual electrodes by the photoengraving process.