Contrast enhancement layer composition with naphthoquinone diazide, indicator dye and polymeric binder

• US 4,672,021 A
• Filed: 06/03/1985
• Issued: 06/09/1987
• Est. Priority Date: 06/03/1985
• Status: Expired due to Fees

• Current Assignee: Fairmount Chemical Company Incorporated
• Original Assignee: Fairmount Chemical Company Incorporated
• Inventors: Deutsch, Albert S., Blumel, David B.
• Primary Examiner(s): Bowers, Jr., Charles L.
• Application Number:
  US06/740,369
• Time in Patent Office: 736 Days
• Field of Search: 430/191, 430/192, 430/175, 430/156, 430/311, 430/312, 430/193
• US Class Current: 430/191
• CPC Class Codes: G03F 7/091 characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement

Abstract

This invention relates to a composition and method for enhancing the contrast of images of an underlying photolithographic layer. A photographic element, including a photoresist layer, is applied to a substrate. The photoresist layer contains a contrast-enhancing layer including at least one light-sensitive compound capable of producing acidic photoproducts upon exposure to actinic radiation, at least one indicator dye that changes color on exposure to acidic conditions and at least one polymeric binder soluble in water or weakly alkaline aqueous solutions. The photographic element is exposed to active radiation sufficient to cause photobleaching of the contrast enhancement layer and exposure of the photoresist layer. The photographic element is exposed to actinic radiation sufficient to cause photobleaching of the contrast enhancement layer and exposure of the photoresist layer. The photographic element is developed in an aqueous photoresist developer, whereby the contrast enhancement layer is stripped from the photoresist layer by the developer.

Claims

1. A contrast-enhancing, photobleachable composition for use on a photoresist layer comprising:

a water-soluble, light-sensitive compound which, upon exposure to actinic radiation, produces acidic photoproducts and its absorbance of radiation in the range of about 300 to about 450 nanometers substantially disappears, said compound being selected from the group consisting of napthoquinone-1,2-(diazide-2)-5-sodium sulfonate and naphthoquinone-1,2-(diazide-2-4-sodium sulfonate;

a water-soluble indicator dye which before exposure to acidic conditions is highly absorbent to radiation within the range of about 350 to about 450 nm, but upon exposure to acidic conditions, undergoes a substantial disappearance of its absorbance of radiation in said range, said dye being selected from the group consisting of 2,4-dinitrophenol, 3-nitrosalicylaldehyde, metaniline yellow, methyl orange, ethyl orange, propyl red, ethyl red, methyl red, o-nitrophenol, n-nitrophenol, sodium-p-nitrophenoxide and pyridine-2-azodimethylaniline; and

a polymeric binder which is substantially transparent to radiation in the range of about 300 to about 450 nanometers and is soluble in a member selected from the group consisting of water and weakly alkaline aqueous solutions;

Wherein said compound is provided in an amount ranging between about 5 and about 90% by weight based on said polymeric binder and said indicator dye is provided in an amount not exceeding the maximum amount that can be rendered transparent to said radiation range by said acidic photoproducts of said compound.

2. The composition of claim 1, wherein said binder is soluble in the developing solutions used for the development fo photoresist materials.

3. The composition of claim 2 wherein said polymeric binder is slected from the group consisting of poly(vinyl alcohol), poly(vinyl pyrrolidone) and vinyl pyrrolidone-vinyl acetate copolymers.

4. The composition of claim 1 wherein said indicator is sodium-p-nitophenoxide.

5. The composition of claim 3 wherein said polymeric binder is selected from the group consisting of poly(vinyl alcohol), poly(vinyl pyrrolidone) and vinyl pyrrolidone/vinyl acetate copolymers.

6. The composition of claim 5 further comprising a solvent selected from the group consisting of water, watermiscible organic solvents and mixtures thereof.