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Apparatus for forming deposited film

  • US 4,674,434 A
  • Filed: 07/03/1985
  • Issued: 06/23/1987
  • Est. Priority Date: 07/09/1984
  • Status: Expired due to Term
First Claim
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1. An apparatus for forming a deposited film comprising:

  • a first compartment for forming a film on a substrate through thermal decomposition or polymerization of a starting gas, said first compartment having an evacuation means, a starting gas introducing means, a substrate holding means, and a heat applying means;

    a second compartment for forming a film on a substrate through discharge decomposition or polymerization of a starting gas, said second compartment having an evacuation means, a starting gas introducing means, a substrate holding means, and a dischargae generating means; and

    a means for delivering a substrate into and out of the first and second compartments.

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