Method for automatically setting an operating point given signal curve measurements with a particle beam measuring apparatus
First Claim
1. In a method for automatically setting an operating point given signal curve measurements with a particle beam measuring apparatus wherein primary particles impinge on a measuring location, an energy shift of secondary particle being triggered at the measuring location and being measured with an opposing field spectrometer, and an opposing field of the opposing field spectrometer being set via a feedback circuit to a predetermined rated value for a specific reference potential at said measuring location, wherein an improvement comprises the steps of:
- prior to measurement of time-dependency of signals on the specimen(a) applying a periodic signal curve to said measuring location given stroboscopically keyed primary particles, said periodic signal curve also having a defined reference potential in addition to other potentials;
(b) varying a keying phase of said keyed primary particles with respect to said periodic signal curve;
(c) at least partially qualitatively registering the periodic signal curve;
(d) determining a phase point of the qualitatively registered signal curve which corresponds to said defined reference pontential at said measuring location;
(e) setting said keying phase of said keyed primary particles to a phase point of said periodic signal curve wherein said defined reference pontential is present at said measuring location; and
(f) during setting of said operating point, keeping this keying phase at such phase points so that said reference pontential is present at said measuring location.
5 Assignments
0 Petitions
Accused Products
Abstract
A method for automatically setting an operating point in signal curve measurements with particle beam measuring apparatus. An automatic setting of the operating point is provided when no specific point in time is known at which a reference potential is present at a measuring location. Given stroboscopically keyed primary particles, a periodic signal curve, which also comprises a specific reference potential in addition to other potentials, is applied to the measuring location. The keying phase of the keyed primary particles is varied with respect to the periodic signal curve. The periodic signal curve is quantitatively registered in this fashion. The phase point of the qualitatively registered signal curve which corresponds to the specific reference potential at the measuring location is identified. A keying phase of the primary particles is kept constant during the setting of the operating point, and is kept constant to phase points at which the reference potential is present at the measuring location.
12 Citations
6 Claims
-
1. In a method for automatically setting an operating point given signal curve measurements with a particle beam measuring apparatus wherein primary particles impinge on a measuring location, an energy shift of secondary particle being triggered at the measuring location and being measured with an opposing field spectrometer, and an opposing field of the opposing field spectrometer being set via a feedback circuit to a predetermined rated value for a specific reference potential at said measuring location, wherein an improvement comprises the steps of:
-
prior to measurement of time-dependency of signals on the specimen (a) applying a periodic signal curve to said measuring location given stroboscopically keyed primary particles, said periodic signal curve also having a defined reference potential in addition to other potentials; (b) varying a keying phase of said keyed primary particles with respect to said periodic signal curve; (c) at least partially qualitatively registering the periodic signal curve; (d) determining a phase point of the qualitatively registered signal curve which corresponds to said defined reference pontential at said measuring location; (e) setting said keying phase of said keyed primary particles to a phase point of said periodic signal curve wherein said defined reference pontential is present at said measuring location; and (f) during setting of said operating point, keeping this keying phase at such phase points so that said reference pontential is present at said measuring location. - View Dependent Claims (2, 3, 4, 5, 6)
-
Specification
-
- Resources
-
Current AssigneeAdvantest Corporation
-
Original AssigneeSiemens AG
-
InventorsFazekas, Peter, Feuerbaum, Hans-Peter
-
Primary Examiner(s)Eisenzopf, Reinhard J.
-
Assistant Examiner(s)BURNS, WILLIAM
-
Application NumberUS06/706,105Time in Patent Office846 DaysField of Search324/73 R, 324/71.4, 324/73 R, 324/158 D, 324/158 R, 324/409, 250/307, 250/310, 250/397, 250/311US Class Current324/750.01CPC Class CodesG01R 31/305 using electron beams invest...H01J 37/266 Measurement of magnetic- or...
