Alignment apparatus

• US 4,677,301 A
• Filed: 12/14/1984
• Issued: 06/30/1987
• Est. Priority Date: 12/19/1983
• Status: Expired due to Term

• Current Assignee: Nikon Corporation
• Original Assignee: Nippon Kogaku K. K. (Nikon Corporation)
• Inventors: Tanimoto, Akikazu, Matsuura, Toshio, Uehara, Makoto, Suwa, Kyoichi, Murakami, Seiro
• Primary Examiner(s): Wan, Gene
• Application Number:
  US06/681,843
• Time in Patent Office: 928 Days
• Field of Search: 250/548, 250/202, 250/203, 250/234, 356/399, 356/400
• US Class Current: 250/548
• CPC Class Codes: G03F 9/70 for microlithography measuring printed patterns for monitoring overlay G03F7/70633 or focus G03F7/70641; projection system adjustment G03F7/70258; position control G03F7/70775

Abstract

A position alignment apparatus aligns a photosensitive substrate and a mask (projection image) at high speed and with high precision. The apparatus has a projection optical system for projecting a pattern image on a mask or reticle onto a photosensitive substrate, a detector for detecting a two-dimensional misalignment of a projected pattern image and a wafer, and means for moving the wafer along orthogonal x- and y-axis directions and for rotating the wafer along a rotational direction within a plane defined by the x- and y-axis directions so as to eliminate the misalignment, wherein the detector has first detecting means with an optical system for detecting at least a misalignment of the wafer along the x-axis direction through the projection lens, and second detecting means with an optical system separate from the projection lens and for detecting at least a misalignment of the wafer along a rotational direction.

Claims

1. In an apparatus for projecting an image of a pattern onto a substrate by a projection optical system, an apparatus for detecting a two-dimensional positional error between the image of the pattern and the substrate, comprising:

first detecting means for detecting a positional error along an x-axis of an x-y orthogonal coordinate system arranged on an image surface of said projection optical system and having an origin on an optical axis of said projection optical system, said first detecting means including optical means for allowing observation of the image surface through said projection optical system; and

second detecting means for detecting a positional error along a y-axis of the x-y coordinate system and a positional error along a rotating direction about the origin, said second detecting means including optical means for allowing observation of the image surface and arranged separately from said projection optical system.

2. An apparatus according to claim 1, wherein said first detecting means further includes means for generating a radiation beam for scanning the image surface through said projection optical system, and means for receiving said beam reflected by the image surface.

3. An apparatus according to claim 1, wherein said second detecting means further includes means for generating a radiation beam for scanning the image surface, objective lens means, arranged in the vicinity of said projection optical system, for focusing said beam on the image surface, and means for receiving said beam reflected by the image surface through said objective lens means.

4. An apparatus according to claim 3, wherein said objective lens means has first and second lens systems which are arranged at a predetermined distance from said projection optical system.

5. In an apparatus for projecting an image of a pattern onto a substrate by a projection optical system, an apparatus for detecting a two-dimensional positional error between the image of the pattern and the substrate, comprising:

first detecting means for detecting a positional error along an x-axis of an x-y orthogonal coordinate system arranged on an image surface of said projection optical system and having an origin on an optical axis of said projection optical system and a positional error along a y-axis of the x-y coordinate system, said first detecting means including optical means for allowing observation of the image surface through said projection optical system; and

second detecting means for detecting a positional error along a rotating direction about the origin, said second detecting means including optical means for allowing observation of the image surface and arranged separately from said projection optical system.

6. An apparatus according to claim 5, wherein said first detecting means further includes means for generating a radiation beam for scanning the image surface through said projection optical system, and means for receiving said beam reflected by the image surface.

7. An apparatus according to claim 5, wherein said second detecting means further includes means for generating a radiation beam for scanning the image surface, objective lens means, arranged in the vicinity of said projection optical system, for focusing said beam on the image surface, and means for receiving said beam reflected by the image surface through said objective lens means.

8. An apparatus according to claim 7, wherein said objective lens means has first and second lens systems which are arranged at a predetermined distance from said projection optical system.

9. An apparatus for detecting a position of an object, comprising:

mark means arranged at a predetermined position on the object and having a plurality of short line segments arranged in a stripe pattern elongated linearly in a predetermined direction;

means for providing on the object a radiation beam;

scanning means for providing a two-dimensional relative displacement between the object and said beam;

means for photoelectrically detecting diverged light from said mark means produced upon irradiation of said mark means with said beam;

said detecting means including at least a pair of converting means for receiving diverged beams emerging form the stripe pattern to opposite sides of said radiation beam and for generating corresponding electrical outputs, amplifying means respectively connected to said converting means, and means for controlling a gain of at least one of said amplifying means so that the amplified electrical outputs become equal to each other; and

means responsive to said detecting means for determining the position of said object relative to said radiation beam on said object.

10. An apparatus according to claim 9, wherein said radiation beam is elongated in the same direction as said predetermined direction of said stripe pattern.

11. An apparatus according to claim 9, wherein said scanning means includes means for oscillating said radiation beam in a direction intersecting said predetermined direction, and each of said amplified electrical outputs is an alternating signal.

12. An apparatus according to claim 11, wherein said detecting means further includes means for adding said amplified electrical outputs of said amplifying means to generate an adding signal, and said determining means includes means for detecting a phase difference between an oscillation of said radiation beam and said adding signal.

13. In an apparatus for processing a substrate by an energy beam directed onto said substrate through an imaging optical system, an apparatus for detecting a two-dimensional positional error between said energy beam and said substrate, comprising:

first detecting means for detecting a positional error along an x-axis of an x-y orthogonal coordinate system arranged on an image surface of said imaging optical system and having an origin on an optical axis of said imaging optical system, said first detecting means including optical means for detecting an optical condition of the image surface through said imaging optical system; and

second detecting means for detecting a positional error along a y-axis of the x-y coordinate system and a positional error along a rotating direction about the origin, said second detecting means including optical means for detecting the optical condition of the image surface and arranged separately from said imaging optical system.

14. An apparatus according to claim 13, wherein said first detecting means further includes means for generating a radiation beam for scanning the image surface through said imaging optical system, and means for receiving said radiation beam reflected by the image surface.

15. An apparatus according to claim 13, wherein said second detecting means further includes means for generating a radiation beam for scanning the image surface, objective lens means, arranged in the vicinity of said imaging optical system, for focusing said radiation beam on the image surface, and means for receiving said radiation beam reflected by the image surface through said objective lens means.

16. In an apparatus for processing a substrate by an energy beam directed onto said substrate through an imaging optical system, an apparatus for detecting a two-dimensional positional error between said energy beam and said substrate, comprising:

first detecting means for detecting a positional error along an x-axis of an x-y orthogonal coordinate system arranged on an image surface of said imaging optical system and having an origin on an optical axis of said imaging optical system and a positional error along a y-axis of the x-y coordinate system, said first detecting means including optical means for detecting an optical condition of the image surface through said imaging optical system; and

second detecting means for detecting a positional error along a rotating direction about the origin, said second detecting means including optical means for detecting the optical condition of the image surface and arranged separately from said imaging optical system.

17. An apparatus according to claim 16, wherein said first detecting means further includes means for generating a radiation beam for scanning the image surface through said imaging optical system, and means for receiving said radiation beam reflected by the image surface.

18. An apparatus according to claim 16, wherein said second detecting means further includes means for generating a radiation beam for scanning the image surface, objective lens means, arranged in the vicinity of said imaging optical system, for focusing said radiation beam on the image surface, and means for receiving said radiation beam reflected by the image surface through said objective lens means.