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Matching circuit for delivering radio frequency electromagnetic energy to a variable impedance load

  • US 4,679,007 A
  • Filed: 05/20/1985
  • Issued: 07/07/1987
  • Est. Priority Date: 05/20/1985
  • Status: Expired due to Fees
First Claim
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1. A matching circuit for delivering radio frequency electromagnetic energy to a discharge process comprising:

  • a variable impedance load;

    a radio frequency power supply for applying radio frequency power to said load; and

    a matching network for coupling and impedance matching said power supply to said load said matching network comprising;

    (i) a ratio control means for directly establishing a voltage ratio between said power supply and said load, said ratio control means comprising;

    a first ratio inductance electrically connected parallel to said load;

    a first variable ratio capacitance electrically connected in series with said load;

    a second variable ratio capacitance electrically connected parallel to said load;

    a third variable ratio capacitance electrically connected parallel to said load; and

    (ii) a tuning control means for directly tuning out a complex portion of the reactance of said load, said tuning control means comprising;

    a variable tuning capacitance electrically connected parallel to said load; and

    a tuning inductance electrically connected parallel to said load.

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