Matching circuit for delivering radio frequency electromagnetic energy to a variable impedance load
First Claim
1. A matching circuit for delivering radio frequency electromagnetic energy to a discharge process comprising:
- a variable impedance load;
a radio frequency power supply for applying radio frequency power to said load; and
a matching network for coupling and impedance matching said power supply to said load said matching network comprising;
(i) a ratio control means for directly establishing a voltage ratio between said power supply and said load, said ratio control means comprising;
a first ratio inductance electrically connected parallel to said load;
a first variable ratio capacitance electrically connected in series with said load;
a second variable ratio capacitance electrically connected parallel to said load;
a third variable ratio capacitance electrically connected parallel to said load; and
(ii) a tuning control means for directly tuning out a complex portion of the reactance of said load, said tuning control means comprising;
a variable tuning capacitance electrically connected parallel to said load; and
a tuning inductance electrically connected parallel to said load.
1 Assignment
0 Petitions
Accused Products
Abstract
A matching circuit is provided for delivering radio frequency electromagnetic energy from a radio frequency power supply to a variable impedance load such as a gas plasma. The matching network couples and impedance matches the power supply to the load. The matching network includes a ratio circuit for establishing a voltage ratio between the power supply and the load and a tuning circuit for tuning out a complex portion of the reactance of the load. Separation and control of the ratio and tuning variables is achieved through provision of a ratio control circuit comprising a lumped quarter wave transformer and a tuning control circuit comprising a variable tuning capacitance and a tuning inductance electrically connected in parallel to the load. The lumped quarter wave transformer comprises first and second ratio inductances electrically connected parallel to the load; a first variable ratio capacitance electrically connected in series with the load; and second and third variable ratio capacitances electrically connected parallel to the load. Ratio and tuning inductances are provided comprising toroidal-shaped forms having layers of electrically conductive material deposited or applied thereover. The ratio and tuning capacitances are provided with electrically floating butterfly-shaped rotors ganged on drive shafts driven by high speed torque motors.
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Citations
17 Claims
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1. A matching circuit for delivering radio frequency electromagnetic energy to a discharge process comprising:
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a variable impedance load; a radio frequency power supply for applying radio frequency power to said load; and a matching network for coupling and impedance matching said power supply to said load said matching network comprising; (i) a ratio control means for directly establishing a voltage ratio between said power supply and said load, said ratio control means comprising; a first ratio inductance electrically connected parallel to said load; a first variable ratio capacitance electrically connected in series with said load; a second variable ratio capacitance electrically connected parallel to said load; a third variable ratio capacitance electrically connected parallel to said load; and (ii) a tuning control means for directly tuning out a complex portion of the reactance of said load, said tuning control means comprising; a variable tuning capacitance electrically connected parallel to said load; and a tuning inductance electrically connected parallel to said load. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification