Process control interface system for designer and operator

• US 4,679,137 A
• Filed: 04/30/1985
• Issued: 07/07/1987
• Est. Priority Date: 04/30/1985
• Status: Expired due to Term

• Current Assignee: Tencor Instruments (KLA Corporation)
• Original Assignee: Prometrix Corp (KLA Corporation)
• Inventors: Mallory, Chester L., Perloff, David S., Lane, Leslie A., Lybeck, Lynn V.
• Primary Examiner(s): Smith, Jerry
• Assistant Examiner(s): NOT, DEFINED
• Application Number:
  US06/729,153
• Time in Patent Office: 798 Days
• Field of Search: 364/146, 364/188, 364/191, 364/192, 364/193, 364/171, 364/200 MS File, 340/706, 340/712
• US Class Current: 700/83
• CPC Class Codes: G05B 19/409 characterised by using manual data input [MDI] or by using control panel, e.g. controlling functions with the panel; characterised by control panel details or by setting parameters G05B19/408, G05B19/4093 take precedence
• CPC Class Codes: G05B 2219/36168 Touchscreen

Abstract

A system and method for computer control of machine processes, including a dynamic menu feature used in the selection of processes and the definition and selection of operating parameters used by a process control program to direct the performance of the process by the machine.

Data structures for a multiplicity of processes are defined and stored. Values stored in the data structures indicate which processes are available for use and the process control program associated with each process. Furthermore, for each parameter of each process a data structure contains an indicia of whether the parameter is a forced entry parameter (which must be given a value before the process is run), a may change parameter (with a default value that may be changed when the process is run), or a locked parameter which has a fixed value.

An engineering set up program enables interactive computer controlled performance of the steps of storing the above-mentioned data structures, entry of values into the data structures, and the entry of default parameter values. An operator control program, utilizing the stored data structures, enables interactive computer controlled performance of the steps of selecting one of the enabled processes, entry of parameter values, and running of the selected process.

Claims

1. In a method of controlling a process using a programmed digital computer, the steps of:

(a) establishing a set of process control programs, each having associated therewith a set of predefined parameters;

(b) defining a parameter data structure format for each of said process control programs, including

parameter denoting means for denoting each of said predefined parameters as an operator unalterable parameter having a fixed value, an operator alterable parameter having a default value, or a forced operator entry parameter that must be supplied with a value before the process is run; and

parameter value storing means for storing a value for each of said predefined parameters;

(c) establishing an engineering set up control program for enabling interactive computer controlled performance of the steps of

storing, for each of a multiplicity of specified processes, a parameter data structure in accordance with said parameter data structure format for a specified one of said process control programs;

specifying one of said processes for engineering set up;

entering into said parameter denoting means in said parameter data structure for said specified process a value for each of said predefined parameters to specify it as an operator unalterable parameter, an operator alterable parameter, or a forced operator entry parameter; and

entering into the parameter value storing means in said parameter data structure for said specified process fixed values for said operator unalterable parameters and default values for said operator alterable parameters; and

(d) establishing an operator control program for enabling interactive computer controlled performance of the steps of

selecting one of said specified processes;

utilizing said stored parameter data structure for said selected process, entering values for said operator alterable and forced operator entry parameters for said selected process; and

running the process control program corresponding to said selected process only after values have been entered for all the forced operator entry parameters corresponding to said selected process.

2. The method of claim 1, further including the step of:

defining and storing for each of said multiplicity of specified processes a process selection data structure including;

process name means for storing a preselected process name for said process; and

process availability denoting means for denoting whether the running of the corresponding process is enabled or disabled;

wherein

said step of establishing an engineering set up control program includes enabling interactive computer controlled performance of the steps of;

entering into the process name means in the process selection data structure for said specified process a name for said specified process; and

entering into the process availability denoting means in the process selection data structure for said specified process a value to specify whether the running of said specified process is enabled or disabled; and

said step of selecting one of said processes includes the steps of;

displaying said process names; and

selecting one of said processes which has a value in the corresponding process availability denoting means specifying it as enabled.

3. The method of claim 2, adapted to provide different operator access levels to the running of said multiplicity of specified processes,

said engineering set up control program further enabling interactive computer controlled performance of the step of

storing on each of a plurality of individual, operator-related, portable, nonvolatile storage means, said process selection and parameter data structures for each of said multiplicity of processes;

and

said method further including the step of

reading and storing the data structures for a multiplicity of processes from one of said operator-related, portable, nonvolatile storage means, said data structures thereafter being available for use by both said engineering set up control program and said operator control program;

wherein said process selection and parameter data structures can be modified using said engineering set up control program so that different ones of said operator-related storage means provide different operator access levels to the running of said specified processes.

4. The method of claim 2, further including the step of

defining and storing a group data structure including

group name means for storing a preselected group name for each of a plurality of prearranged groups of said specified processes;

and

group availability denoting means for each of said prearranged groups of said processes, denoting whether the running of the corresponding group of processes is enabled or disabled;

said step of establishing an engineering set up control program includes enabling interactive computer controlled performance of the steps of

entering into the group name means in said group data structure a group name for a specified group of processes; and

entering into the group availability denoting means in said group data structure a value to specify whether the running of a specified group of processes is enabled or disabled;

said step of selecting one of said processes includes, prior to said step of displaying said process names, the steps of;

displaying said group names; and

selecting one of said groups which has a value in the corresponding group availability denoting means specifying it as enabled; and

said step of displaying said process names comprises displaying only process names associated with said selected group.

5. The method of claim 4, adapted for use on a computer which includes a computer display device, and further comprising the steps of:

defining a plurality of separate main menu items comprising said preselected group names of said prearranged groups of said specified processes;

defining a plurality of separate groups of auxiliary menu items, each being associated with at least one of said main menu items and comprising one of said preselected process names;

establishing at least two separate menu display regions on said computer display device, each being capable of displaying multiple menu items and an associated selectably positionable pointer to an individual menu item;

displaying in a first one of said menu display regions at least a plurality of said main menu items together with said associated pointer positioned at one of said displayed main menu items;

displaying simultaneously in a second one of said menu display regions at least a portion of one of said groups of auxiliary menu items associated with the main menu item being selected at in said first menu display region together with said associated pointed positions at one of said displayed auxiliary menu items;

automatically responding to a position change of said pointer in said first menu display region to point at a new main menu item by altering said second menu display region to display at least a portion of one of said groups of auxiliary menu items associated with the new main menu item being pointed at; and

wherein

said steps of entering a value into the group availability denoting means in said group data structure for a specified group, and entering a value into the process availability denoting means in said process selection data structure for a specified process, include the steps of

moving said selectably positionable pointer for the corresponding menu display region to point at the name of said specified group or the name of said specified process to select an associated one of said group availability denoting means or said process availability denoting means; and

entering said value.

6. The method of claim 5, wherein said displaying steps further include displaying items which are denoted in said group data structure and process selection data structure as enabled in a manner which visually distinguishes said items from those items which are denoted as not enabled.

7. The method of claim 1, adapted for use on a computer which includes a computer display device, and further comprising the steps of:

defining a prompt data structure including

process name means for storing a preselected process name for each of said specified processes; and

group name mens for storing a preselected group name for each of a plurality of prearranged groups of said specified processes;

defining a plurality of separate main menu items comprising said group names;

defining a plurality of separate groups of auxiliary menu items, each being associated with at least one of said main menu items and comprising one of said process names;

establishing at least two separate menu display regions on said computer display device, each being capable of displaying multiple menu items and an associated selectably positionable pointer to an individual menu item;

displaying in a first one of said menu display regions at least a plurality of said main menu items together with said associated pointer positioned at one of said displayed main menu items;

displaying simultaneously in a second one of said menu display regions at least a portion of one of said groups of auxiliary menu items associated with the main menu item being selected at in said first menu display region together with said associated pointer positions at one of said displayed auxiliary menu items; and

automatically responding to a position change of said pointer in said first menu display region to point at a new main menu item by altering said second menu display region to display at least a portion of one of said groups of auxiliary menu items associated with the new main menu item being pointed at;

whereby at least one of said steps of specifying one of said processes for engineering set up and selecting one of said processes, includes the steps of;

moving said pointer for said first menu display region to point at the group name corresponding to the process to be specified or selected; and

moving said pointer for said second menu display region to point at the process name corresponding to the process to be specified or selected.

8. The method of claim 1, adapted for use on a computer which includes a computer display device, and further comprising the steps of:

defining a prompt data structure including

process name means for storing a preselected process name for each of said specified processes; and

group name means for storing a preselected group name for each of a plurality of prearranged groups of said specified processes;

defining a plurality of separate main menu items comprising said group names;

defining a plurality of separate groups of auxiliary menu items, each being associated with at least one of said main menu items and comprising one of said process names;

establishing at least two separate menu display regions on said computer display device, each being capable of displaying multiple menu items and an associated selectably positionable pointer to an individual menu item;

displaying in a first one of said menu display regions at least a plurality of said main menu items together with said associated pointer positioned at one of said displayed main menu items;

displaying simultaneously in a second one of said menu display regions at least a portion of one of said groups of auxiliary menu items associated with the main menu item being selected at in said first menu display region together with said associated pointer positions at one of said displayed auxiliary menu items; and

automatically responding to a position change of said pointer in said first menu display region to point at a new main menu item by altering said second menu display region to display at least a portion of one of said groups of auxiliary menu items associated with the new main menu item being pointed at;

wherein

said step of establishing an engineering set up control program includes enabling interactive computer controlled performance of the steps of

entering a new group name into said group name means in said prompt data structure for the group of processes corresponding to the item pointed at by the pointer in said first menu display region; and

entering a new process name into said process name means in said prompt data structure for the process corresponding to the item pointed at by the pointer in said second menu display region.

9. The method of claim 8, wherein said step of establishing display regions provides three separate menu display regions on said computer display device;

said method further including the steps of;

defining a set of preselected names for said set of established process control programs;

defining a program data structure for storing an idicia of the process control program associated with each of said specified processes; and

displaying simultaneously in said third menu display region the names of the process programs corresponding to the process names displayed in said second menu display region;

wherein

said step of establishing an engineering set up control program includes enabling interactive computer controlled performance of the step of

selecting the process control program for the process corresponding to the item being pointed at in said second menu display region from said set of established process control programs, including entry of a corresponding indicia in said program data structure and displaying the name of said selected process control program in said third menu display region.

10. The method of claim 8, wherein said steps of entering a group name and entering a process name include the steps of:

designating a corresponding one of said selectably positionable pointers as the active pointer for name entering; and

displaying the item being pointed at by said active pointer in a manner which visually distinguishes said item from the item being pointed at by said other selectably positionable pointer.

11. The method of claim 1, adapted for use on a computer which includes a computer display device, and further comprising the steps of:

defining a plurality of separate main menu items comprising preselected names of preselected groups of predefined engineering set up tasks;

defining a plurality of separate groups of auxiliary menu items, each being associated with at least one of said main menu items and comprising preselected names of said predefined engineering set up tasks;

establishing at least two separate menu display regions on said computer display device, each being capable of displaying multiple menu items and associated selectably positionable pointer to an individual menu item;

displaying in a first one of said menu display regions at least a plurality of said main menu items together with said associated pointer positioned at one of said displayed main menu items;

displaying simultaneously in a second one of said menu display regions at least a portion of one of said groups of auxiliary menu items associated with the main menu item being selected at in said first menu display region together with said associated pointer positions at one of said displayed auxiliary menu items;

automatically responding to a position change of said pointer in said first menu display region to point at a new main menu item by altering said second menu display region to display at least a portion of one of said groups of auxiliary menu items associated with the new main menu item being pointed at; and

responding to a task signal by performing a task corresponding the item pointed at by the pointer in said second menu display region;

wherein

one said predefined engineering tasks comprises a test set up task which enables interactive computer controlled performance of said steps of

entering a value into said parameter denoting means of said parameter data structure for said specified process; and

entering a value into the parameter value storing means in said parameter data structure for said specified process.

12. The method of claim 11, further including the step of:

defining a prompt data structure including

process name means for storing a preselected process name for each of said specified processes; and

group name means for storing a preselected group name for each of a plurality of prearranged groups of said specified processes;

wherein

another one of said predefined engineering tasks comprises an operator prompt task which enables interactive computer controlled performance of the steps of

entering a new group name into said group name means in said prompt data structure for a specified group of processes; and

entering a new process name into said process name means in said prompt data structure for a specified process; and

another one of said predefined engineering tasks comprises an update task for performing the step of storing said parameter data structure on a portable, nonvolatile storage means.

13. The method of claim 12, wherein during the performance of said operator prompt task,

said group names are displayed in said first menu display region;

said process names corresponding to the group name being pointed at in said first menu region are displayed in said second menu display region; and

said selectably positionable pointers are used to specify the group and process used in said entering a new group name and entering a new process name steps.

14. The method of claim 11, further including the step of:

defining an availability data structure including

process availability denoting means for each said specified process denoting whether the running of the corresponding process is enabled or disabled;

group availability denoting means for each of said prearranged groups of said processes, denoting whether the running of the corresponding group of processes is enabled or disabled;

wherein

another one of said predefined engineering tasks comprises an operator choices task which enables interactive computer controlled performance of the steps of

entering into said process availability denoting means in said availability data structure for said specified process a value to specify whether the running of said specified process is enabled or disabled; and

entering into said group availability denoting means in said availability data structure a value to specify whether the running of a specified group of processes is enabled or disabled.

15. The method of claim 14, further including the step of:

defining a prompt data structure including

process name means for storing a preselected process name for each of said specified processes; and

group name means for storing a preselected group name for each of a plurality of prearranged groups of said specified processes;

wherein

another one of said predefined engineering tasks comprises an operator prompt task which enables interactive computer controlled performance of the steps of

entering a new group name into said group name means in said prompt data structure for a specified group of processes; and

entering a new process name into said process name means in said prompt data structure for a specified process;

during the performance of said operator prompt task,

said group means are displayed in said first menu display region;

said process names corresponding to the group name being pointed at in said first menu region are displayed in said second menu display region; and

said selectably positionable pointers are used to specify the group and process used in said entering a new group name and entering a new process name steps; and

another one of said predefined engineering tasks comprises an update task for performing the step of storing said parameter data structures on a portable, nonvolatile storage means.

16. The method of claim 1, further adapted for use with an automated resistivity test system including:

a resistivity test probe having a plurality of signal leads for receiving an input current and returning an output voltage;

means for responding to a command from said computer to supply a programmable level of current to said signal leads of said probe;

means for responding to a command from said computer to receive said voltage output from said probe and for translating said output signal into a digital signal representatin of said voltage level; and

means for responding to a command from said computer for positioning said probe at a test site comprising a programmable position coordinate on a semiconductor wafer for making a resistivity measurement thereat; and

wherein said process control programs comprise a contour map program for making resistivity measurements at a two-dimensional array of test sites on said wafer and a diameter scan program for making resistivity measurements at a multiplicity of test sites along a prearranged diameter line of said wafer;

said set of predefined parameters for said contour map program include a number of test sites parameter, a test diameter parameter, and a measure current parameter;

said set of predefined parameters for said diameter scan program include a number of sites parameter, a test diameter parameter, a measure current parameter, and an angle of scan parameter;

said contour map program enables said computer to direct said tester to carry out automatically the steps of;

using the values of said number of test sites and test diameter parameters to position said test probe on said wafer at each of a two-dimensional array of test sites within said test diameter on said wafer and corresponding to the number of test sites parameter value;

measuring the resistivity value at each said test site using said measure current parameter to supply a corresponding level of current to said test probe and receiving an associated digital representation of the output voltage produced thereby; and

storing said resistivity value for each of said test sites; and

said diameter scan program enables said computer to direct said tester to carry out automatically the steps of;

using the values of said number of test sites, test diameter, and angle of scan parameters to position said test probe on said wafer at each of a plurality of regularly spaced test sites along a diameter of said wafer corresponding to said angle of scan parameter;

measuring the resistivity value at each said test site using said measure current parameter to supply a corresponding level of current to said test probe and receiving an associated digital representation of the output voltage produced thereby; and

storing said resistivity value for each of said test sites.

17. The method of claim 1,

said engineering set up control program further enabling interactive computer controlled performance of the step of

storing on each of a plurality of individual, operated-related, portable, nonvolatile storage means, said parameter data structure for each of said multiplicity of processes;

and

said method further including the step of

reading and storing the data structures for a multiplicity of processes from one of said operator-related, portable, nonvolatile storage means, said data structures thereafter being available for use by both said engineering set up control program and said operator control program;

wherein said parameter data structures can be modified using said engineering set up control program so that different ones of said operator-related storage means provide different operator control levels for running said specified processes.

18. In a method for displaying and selecting menu items on a computer display device, the steps of:

defining a plurality of separate main menu items;

defining a plurality of separate groups of auxiliary menu items, each being associated with at least one of said main menu items;

establishing at least three separate menu display regions on said computer display device, each being capable of displaying multiple menu items and an associated selectably positionable pointer to an individual menu item;

displaying in a first one of said menu display regions at least a plurality of said main menu items together with said associatedd pointer positioned at one of said displayed main menu items;

displaying simultaneously in a second one of said menu display regions at least a portion of one of said groups of auxiliary menu items associated with the main menu item being selected at in said first menu display region together with said associated pointer positions at one of said displayed auxiliary menu items;

automatically responding to a position change of said pointer in said first menu display region to point at a new main menu item by altering said second menu display region to display at least a portion of one of said groups of auxiliary menu items associated with the new main menu item being pointed at;

defining a plurality of groups of tertiary menu items, each group being associated with at least one of said auxilary menu items; and

displaying simultaneously in a third one of said menu display regions at least a portion of one of said groups of tertiary menu items associated with said auxiliary menu item being pointed at in said second menu display regions together with said associated pointer positioned at one of said displayed tertiary menu items;

wherein

said step of automatically responding to a position change of said poiner in said first menu display region further includes the step of simultaneously altering said third menu display region to display at least a portion of one of said groups of tertiary menu items associated with said second menu item being pointed at in said second display region; and

said method further includes the step of automatically responding to a position change of said pointer in said second menu display region without a position change of said pointer in said first menu display region by simultaneously altering said third menu display region to display at least a portion of one of said groups of tertiary menu items associated with said new secondary menu item being pointed at in said second display region.

19. The method of claim 18, wherein said step of automatically responding to a position change of said pointer in said first menu display region further includes automatically repositioning said pointers in said second and third menu display regions to the first auxiliary menu item and first tertiary menu item displayed in said respective display regions.

20. The method of claim 18, further including the steps of:

designating one of said selectably positionable pointers as the active pointer; and

visually distinguishing the item being pointed at by said active pointer from the item being pointed at by said other pointer.

21. The method of claim 18, further including the steps of:

displaying simultaneously at a predefined position of said display an indicia of a selection previously made using a set of menus distinct from the menus currently displayed.

22. The method of claim 18,

further including the step of establishing a program for enabling the selection of items displayed in at least said second menu display region;

wherein said selected items are displayed in a visually distinct manner so that when said pointer for said first menu display region is moved through the items displayed in said first menu display region a person looking at said computer display device can see which items have been selected in each corresponding group of auxiliary menu items.

23. In a method for displaying and selecting menu items on a computer display device, the steps of:

defining a plurality of separate main menu items;

defining a plurality of separate groups of auxiliary menu items, each being associated with at least one of said main menu items;

establishing at least three separate menu display regions on said computer display device, each being capable of displaying multiple menu items and an associated selectably positionable pointer to an individual menu item;

displaying in a first one of said menu display regions at least a plurality of said main menu items together with said associated pointer positioned at one of said displayed main menu items;

displaying simultaneously in a second one of said menu display regions at least a portion of one of said groups of auxiliary menu items associated with the main menu item being selected at in said first menu display region together with said associated pointer positions at one of said displayed auxiliary menu items;

automatically responding to a position change of said pointer in said first menu display region to point at a new main menu item by altering said second menu display region to display at least a portion of one of said groups of auxiliary menu items associated with the new main menu item being pointed at;

defining a plurality of tertiary menu items, each said tertiary menu item corresponding to at least one of said auxiliary menu items; and

displaying simultaneously in said third menu display region the tertiary menu items corresponding to the auxiliary menu items displayed in said second menu display region;

wherein

said step of automatically responding to a position change of said pointer in said first menu display region further includes the step of simultaneously altering said third menu display region to display the tertiary menu items corresponding to the auxiliary menu items displayed in said second menu display region.

24. In a method of controlling a process using a programmed digital computer, the steps of:

(a) establishing a set of process control programs, each having associated therewith a set of predefined parameters required for its operation;

(b) defining a parameter data structure format for each of said process control programs, including

parameter denoting means for denoting each of said predefined parameters as an operator unalterable parameter having a fixed value, an operator alterable parameter having a default value, or a forced operator entry parameter that must be supplied with a value before the process is run; and

parameter value storing means for storing a value for each of said predefined parameters;

(c) establishing an engineering set up control program including

means for storing, for each of a multiplicity of specified processes, a parameter data structure in accordance with said parameter data structure format for a specified one of said process control programs;

parameter access means for entering into said parameter denoting means of said parameter data structure for a specified process a value for each of said predefined parameters to specify it as an operator unalterable parameter, an operator alterable parameter, or a forced operator entry parameter;

value set up means for entering into said parameter value storing means in said parameter data structure for a specified process fixed values for said operator unalterable parameters and default values for said operator alterable parameters; and

(d) establishing an operator control program including

operator process selection means for selecting a process and the corresponding parameter data structure defined and stored by said engineering set up control program;

value entry means, utilizing said stored parameter data structure for said selected process, for enabling operator entry of values for said operator alterable and forced operator entry parameters for said selected process; and

process enabling means for enabling the running of the process control program corresponding to said selected process only after values have been entered for all said forced operator entry parameters corresponding to said selected process.

25. The method of claim 24, further including the step of:

defining and storing for each of said multiplicity of specified processes a process selection data structure including;

process name means for storing a preselected process name for said process; and

process availability denoting means for denoting whether the running of the corresponding process is enabled or disabled;

wherein

said step of establishing an engineering set up control program includes establishing

availability set up means for entering into said process availability denoting means in said process selection data structure for a specified process a value to specify whether the running of said specified process is enabled or disabled; and

said operator process selection means established in said step of establishing an operator control program includes

means for restricting the selection of a process to those processes having a value in the corresponding process availability denoting means specifying it as enabled.

26. The method of claim 25 adapted to provide different operator access to the running of said multiplicity of specified processes,

said engineering set up control program including means for storing on each of a plurality of individual, operator-related, portable, nonvolatile storage means, a parameter data structure and a process selection data structure for each of said multiplicity of processes;

and

wherein said method includes the step of reading and storing said parameter and process selection data structures for a multiplicity of processes from one of said operator-related, portable, nonvolatile storage means, said parameter and process selection data structures thereafter being available for use by both said engineering set up control program and said operator control program;

whereby

said process availability denoting means in the process selection data structures stored on said operator-related, portable, nonvolatile storage means controls the availability of each said process for use by said operator control program; and

said parameter and process selection data structures stored on each operator related, nonvolatile, storage means can be easily and quickly reconfigured by said engineering set up control program.

27. In a method of controlling a process using a programmed digital computer, the steps of:

(a) establishing a set of process control programs, each having associated therewith a set of predefined parameters required for its operation;

(b) defining a parameter data structure format for each of said process control programs, including

parameter denoting means for denoting each of said predefined parameters as an operator unalterable parameter having a fixed value, an operator alterable parameter having a default value, or a forced operator entry parameter that must be supplied with a value before the process is run; and

parameter value storing means for storing a value for each of said predefined parameters;

(c) storing, for each of a multiplicity of specified processes, a parameter data structure in accordance with the parameter data structure format for a specified one of said process control programs;

(d) entering into said parameter denoting means of said parameter data structure for a specified process a value for each of said predefined parameters to specify it as an operator unalterable parameter, an operator alterable parameter, or a forced operator entry parameter;

(e) entering fixed values for said operator unalterable parameters and default values for said operator alterable parameters;

(f) selecting one of said processes;

(g) entering values for said operator alterable and forced operator entry parameters for said selected process; and

(h) enabling the running of the process control program corresponding to said selected process only after values have been entered for all said forced operator entry parameters corresponding to said selected process.

28. In a process control system which uses a programmed digital computer, the combination comprising:

(a) means providing a set of process control programs, each having associated therewith a set of predefined parameters required for its operation;

(b) means for defining a parameter data structure format for each of said process control programs, including

parameter denoting means for denoting each of said predefined parameters as an operator unalterable parameter having a fixed value, an operator alterable parameter having a default value, or a forced operator entry parameter that must be supplied with a value before the process is run; and

parameter value storing means for storing a value for each of said predefined parameters;

(c) engineering set up control program means including

means for storing, for each of a multiplicity of specified processes, a parameter data structure in accordance with the parameter data structure format for a specified one of said process control programs;

parameter access means for entering into said parameter denoting means of said parameter data structure for a specified process a value for each of said predefined parameters to specifyit as an operator unalterable parameter, an operator alterable parameter, or a forced operator entry parameter;

value set up means for entering fixed values for said operator unalterable parameters and default values for said operator alterable parameters; and

(d) operator control program means including

operator process selection means for selecting a process and the corresponding parameter data structure defined and stored by said engineering set up control program;

value entry means, utilizing said stored parameter data structure for said selected process, for enabling operator entry of values for said operator alterable and forced operator entry parameters for said selected process; and

process initiation means for running the process control program corresponding to said selected process, including process enabling means for enabling the running of the process control program corresponding to said selected process only after values have been entered for all said forced operator entry parameters corresponding to said selected process.

29. In a method of controlling a process using a programmed digital computer, the steps of:

(a) establishing a set of process control programs, each having associated therewith a set of predefined parameters required for its operation;

(b) defining a process data structure format for each of said process control programs, including

process availability denoting means for denoting whether the running of the corresponding process control program is enabled or disabled;

parameter value storing means for storing a value for each of said predefined parameters; and

parameter denoting means for denoting each of said predefined parameters as an operator unalterable parameter having a fixed value, an operator alterable parameter having a default value, or a forced operator entry parameter that must be supplied with a value before the process is run;

(c) establishing an engineering set up control program for enabling interactive computer controlled performance of the steps of

storing, for each of a multiplicity of specified processes, a process data structure in accordance with said process data structure format for a specified one of said process control programs;

specifying one of said processes for engineering set up;

entering into said process availability denoting means in said process data structure for a specified process a value to specify whether the running of said specified process is enabled or disabled; and

entering into the parameter value storing means in said process data structure for said specified process fixed values for said operator unalterable parameters and default values for said operator alterable parameters; and

storing on each of a plurality of individual, operator-related, portable, nonvolatile storage means, a process data structure for each of said multiplicity of processes;

(d) establishing a reading and storing program for reading and storing said process data structures for a multiplicity of processes from one of said operator-related, portable, nonvolatile storage means, said process data structures thereafter being available for use by said engineering set up control program and by other programs in said computer;

(e) establishing an operator control program for enabling interactive computer controlled performance of the steps of

selecting one of said processes, restricting the selection of a process to those processes having a corresponding process data structure wherein the running of the process is denoted as enabled;

utilizing said stored process data structure for said selected process, enabling operator entry of values for said operator alterable and forced operator entry parameters for said selected process; and

enabling the running of the process control program corresponding to said selected process only after values have been entered for all said forced operator entry parameters corresponding to said selected process;

whereby

said process availability denoting means in each said process data structure stored on said operator-related, portable, nonvolatile storage means controls the availability of said processes for use by said operator control program; and

said process data structures stored on each operator-related, nonvolatile, storage means can be easily and quickly reconfigured by said engineering set up control program.

30. The method of claim 29, wherein

said operator-related, portable, nonvolatile storage means is also used to store the data, if any, produced by the running of the process control program corresponding to said selected process.

31. In a method of using a programmed digital computer having a display to select an item from a set of predefined items, the steps of:

(a) establishing a plurality of groups of said predefined tasks, and a plurality of subgroups for at least a plurality of said groups, each said subgroup having a predefined set of member items;

(b) establishing an item name for each said item, a subgroup name for each said subgroup, and a group name for each said group;

(c) defining at least three menu display regions on said display, each for displaying a distinct menu, and for each said menu display region, establishing a moveable pointer for pointing to one item in its corresponding menu display region;

wherein the position of each menu display region is independent of the position of said moveable pointers;

(d) simultaneously displaying

in a first one of said menu display regions a menu of said group names; and

in a second one of said menu display regions a menu of at least a subset of the subgroup names for one of said groups of items;

in a third one of said menu display regions a menu of of at least a subset of the item names for one of said subgroup names in said second menu;

(e) responding to movement of said first menu pointer from one item to another item within said first menu by automatically updating said second menu so as to display the subgroup names corresponding to the group name pointed to by said first menu pointer, automatically adjusting said second pointer to point at a subgroup name in said second menu, and automatically updating said third menu so as to display the item names corresponding to the subgroup name pointed to by said second menu pointer; and

(f) responding to movement of said second menu pointer from one item to another item within said second menu by automatically updating said third menu so as to display the item names corresponding to the subgroup name pointed to by said second menu pointer.

32. The method of claim 31,

further including the step of establishing a program for enabling the selection of specified ones of said items and specified ones of said subgroups;

wherein said selected items and subgroups are displayed in a visually distinct manner so that when said first and second menu pointers are moved through the group names displayed in said first menu display region and the subgroups name displayed in said second menu display region, a person looking at said display can see which items have been selected in each corresponding group and subgroup.