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Semiconductor transducer

  • US 4,680,606 A
  • Filed: 06/04/1984
  • Issued: 07/14/1987
  • Est. Priority Date: 06/04/1984
  • Status: Expired due to Fees
First Claim
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1. A semiconductor transducer comprising:

  • a substrate having a well formed in one surface thereof;

    a semiconductor layer having first and second substantially parallel surfaces, the edge portions of said first surface being bonded to said substrate about the periphery of said well, said layer forming a diaphragm over said well;

    a pedestal projecting outwardly from said second surface and being disposed above said well for deflecting said diaphragm in response to a force applied to said pedestal, said pedestal having one or more side walls being substantially orthogonal to said second surface;

    integrated circuit means for transducing deflections of said diaphragm into an electrical signal and being formed at said first surface within said diaphragm, said integrated circuit means having means for sensing deflections of said diaphragm and means responsive to said sensing means for developing said electrical signal as a function of the deflection of said diaphragm; and

    means for electrically conducting said signal to a point on said substrate exteriorly of said semiconductor layer.

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